Micro-pneumatic logic

American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED

Volumn 260, Issue , 2004, Pages 379-385

  Henning, Albert K ^a  

^a Redwood Microsystems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO-PNEUMATIC LOGIC; MICROVALVES; MODEL EQUATIONS; SILICON MEMBRANES;

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; FLOW CONTROL; FLUIDICS; LOGIC GATES; SILICON; TRANSFER FUNCTIONS;

MOSFET DEVICES;

EID: 21444442537     PISSN: 08888116     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-61334     Document Type: Conference Paper

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