메뉴 건너뛰기




Volumn 18, Issue 3, 2008, Pages

A bistable electromagnetically actuated rotary gate microvalve

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROMAGNETIC FIELD EFFECTS; MICROFLUIDICS; SWITCHING;

EID: 42549133534     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035015     Document Type: Article
Times cited : (36)

References (35)
  • 7
    • 0028741021 scopus 로고
    • Silicon micro-machined gas chromatography system used to separate and detect ammonia and nitrogen dioxide: Part i. Design, fabrication, and integration, of the gas chromatography system
    • Reston R R and Kolesar E S 1994 Silicon micro-machined gas chromatography system used to separate and detect ammonia and nitrogen dioxide: part i. Design, fabrication, and integration, of the gas chromatography system J. Microelectromech. Syst. 3 134-46
    • (1994) J. Microelectromech. Syst. , vol.3 , Issue.4 , pp. 134-146
    • Reston, R.R.1    Kolesar, E.S.2
  • 8
    • 0018653907 scopus 로고
    • Gas chromatographic air analyzer fabricated on a silicon wafer
    • Terry S C, Jerman J H and Angell J B 1979 Gas chromatographic air analyzer fabricated on a silicon wafer IEEE Trans. Electron. Dev. 26 1880-86
    • (1979) IEEE Trans. Electron. Dev. , vol.26 , Issue.12 , pp. 1880-1886
    • Terry, S.C.1    Jerman, J.H.2    Angell, J.B.3
  • 9
    • 4444268706 scopus 로고    scopus 로고
    • A versatile MEMS gas chromatograph for determination of environmental vapor mixtures
    • Zellers E T et al 2004 A versatile MEMS gas chromatograph for determination of environmental vapor mixtures Proc. Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head Island, SC, June 2004) (Piscataway, NJ: IEEE) pp 61-6
    • (2004) Proc. Solid-State Sensor, Actuator and Microsystems Workshop , pp. 61-66
    • Zellers, E.T.1    Al, E.2
  • 10
    • 0037390890 scopus 로고    scopus 로고
    • A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing
    • Rich C A and Wise K D 2003 A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing J. Microelectromech. Syst. 12 201-08
    • (2003) J. Microelectromech. Syst. , vol.12 , Issue.2 , pp. 201-208
    • Rich, C.A.1    Wise, K.D.2
  • 17
    • 33847301013 scopus 로고    scopus 로고
    • Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications
    • Luharuka R and Hesketh P J 2007 Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications Sensors Actuators A 134 231-8
    • (2007) Sensors Actuators , vol.134 , Issue.1 , pp. 231-238
    • Luharuka, R.1    Hesketh, P.J.2
  • 18
    • 0038548000 scopus 로고    scopus 로고
    • A self-retracting fully compliant bistable micromechanism
    • Masters N D and Howell L L 2003 A self-retracting fully compliant bistable micromechanism J. Microelectromech. Syst. 12 273-80
    • (2003) J. Microelectromech. Syst. , vol.12 , Issue.3 , pp. 273-280
    • Masters, N.D.1    Howell, L.L.2
  • 19
    • 2142812581 scopus 로고    scopus 로고
    • Confirmation of large-periphery compressible gas flow model for microvalves
    • Henning A K 2004 Confirmation of large-periphery compressible gas flow model for microvalves Proc. SPIE 5344 155-62
    • (2004) Proc. SPIE , vol.5344 , Issue.1 , pp. 155-162
    • Henning, A.K.1
  • 20
    • 18844400289 scopus 로고    scopus 로고
    • A seat microvalve nozzle for optimal gas-flow capacity at large-controlled pressure
    • Wijngaart W v d, Thorsen A and Stemme G 2005 A seat microvalve nozzle for optimal gas-flow capacity at large-controlled pressure J. Microelectromech. Syst. 14 200-6
    • (2005) J. Microelectromech. Syst. , vol.14 , Issue.2 , pp. 200-206
    • Wijngaart, W.V.D.1    Thorsen, A.2    Stemme, G.3
  • 22
    • 36149015257 scopus 로고
    • Coefficient of slip in gases and the law of reflection of molecules from the surfaces of solids and liquids
    • Millikan R A 1923 Coefficient of slip in gases and the law of reflection of molecules from the surfaces of solids and liquids Phys. Rev. 21 217-38
    • (1923) Phys. Rev. , vol.21 , Issue.3 , pp. 217-238
    • Millikan, R.A.1
  • 27
    • 33344473738 scopus 로고    scopus 로고
    • Effective heights and tangential momentum accommodation coefficients of gaseous slip flows in deep reactive ion etching rectangular microchannels
    • Jang J and Wereley S T 2006 Effective heights and tangential momentum accommodation coefficients of gaseous slip flows in deep reactive ion etching rectangular microchannels J. Micromech. Microeng. 16 493-504
    • (2006) J. Micromech. Microeng. , vol.16 , Issue.3 , pp. 493-504
    • Jang, J.1    Wereley, S.T.2
  • 31
    • 0029296703 scopus 로고
    • Equivalent-circuit model of the squeezed gas film in a silicon accelerometer
    • Veijola T, Kuisma H, Lahdenpera J and Ryhanen T 1995 Equivalent-circuit model of the squeezed gas film in a silicon accelerometer Sensors Actuators A 48 239-48
    • (1995) Sensors Actuators , vol.48 , Issue.3 , pp. 239-248
    • Veijola, T.1    Kuisma, H.2    Lahdenpera, J.3    Ryhanen, T.4
  • 32
    • 0015552935 scopus 로고
    • Analysis of face deformation effects on gas film seal performance
    • Zuk J 1973 Analysis of face deformation effects on gas film seal performance ASLE Trans. 16 267-75
    • (1973) ASLE Trans. , vol.16 , Issue.4 , pp. 267-275
    • Zuk, J.1
  • 33
    • 0015316330 scopus 로고
    • Analysis of rotational effects on compressible viscous flow across shift face seals
    • Zuk J and Ludwig L P 1972 Analysis of rotational effects on compressible viscous flow across shift face seals Lubric. Eng. 28 82-92
    • (1972) Lubric. Eng. , vol.28 , pp. 82-92
    • Zuk, J.1    Ludwig, L.P.2
  • 35
    • 1942424056 scopus 로고    scopus 로고
    • A structure of bistable electromagnetic actuated microvalve fabricated on a single wafer, implementing the SLA and PDMS technique
    • Bintoro J S, Luharuka R, Wong E W and Hesketh P J 2003 A structure of bistable electromagnetic actuated microvalve fabricated on a single wafer, implementing the SLA and PDMS technique ASME Int. Mechanical Engineering Congress and Exposition (Washington, DC, United States, 15-21 Nov 2003) vol 5 (New York: ASME) pp 411-7
    • (2003) ASME Int. Mechanical Engineering Congress and Exposition , vol.5 , pp. 411-417
    • Bintoro, J.S.1    Luharuka, R.2    Wong, E.W.3    Hesketh, P.J.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.