Fabrication of low-residual-stress AIN thin films and their application to microgenerators for vibration energy harvesting

Japanese Journal of Applied Physics

Volumn 50, Issue 9 PART 3, 2011, Pages

  Zhang, Jinya ^a   Cao, Ziping ^a   Kuwano, Hiroki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIN THIN FILMS; BOTTOM ELECTRODES; C-AXIS ORIENTATIONS; DEPOSITION TECHNOLOGY; ELECTRIC ENERGIES; ENVIRONMENTAL VIBRATIONS; MICROGENERATORS; MICROMACHINING PROCESS; OUTPUT POWER; SI SUBSTRATES; VIBRATION ENERGY HARVESTING; VIBRATION FREQUENCY;

CYCLOTRONS; ELECTRON CYCLOTRON RESONANCE; MICROMACHINING; NATURAL FREQUENCIES; RESIDUAL STRESSES; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

DEPOSITION;

EID: 80053057979     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.09ND18     Document Type: Article

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