Sputtered AlN thin films on Si and electrodes for MEMS resonators: Relationship between surface quality microstructure and film properties

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2003, Pages 2028-2032

  Mishin, S ^a   Marx, D R ^a   Sylvia, B ^a   Lughi, V ^b   Turner, K L ^b   Clarke, D R ^b  

^a Advanced Modular Sputtering Inc   (United States)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN CRYSTALS; MEMS RESONATORS; OXIDE COATINGS; XRD ROCKING CURVES;

ALUMINUM NITRIDE; CRYSTALLINE MATERIALS; ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; PIEZOELECTRIC DEVICES; PLASMA STABILITY; POLYSILICON; RESONATORS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 4143140078     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. R. Ruby, "Cavity spanning bottom electrode of a substrate-mounted bulk acoustic wave resonator." US Patent No.6,384,697, May 7, 2002.
2. J. F. Nye, Physical Properties of Crystals: Their Representation by Tensors and Matrices.: Oxford University Press, Oxford 1985.
3. A.Gualtieri and J.G. Ballato, "Piezoelectric Materials for Acoustic Wave Applications." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 41, pp 53-59, January 1994.
4. .H.P.Lobl, M.Klee, C. Metzmacher, W.Brand, R. Milsom, P.Lok, F.van Straten "Piezoelectric materials for BAW resonator and filters", 2001 IEEE International Ultrasonics Symposium, Atlanta, GA, Oct. 7-10, 2001, paper 3E-2, pp. 807-811.