Electron cyclotron resonance plasma ion source for material depositions

Review of Scientific Instruments

Volumn 69, Issue 6, 1998, Pages 2320-2324

  Delaunay, M ^a   Touchais, E ^a  

^a CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005185317     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148938     Document Type: Article

References (23)

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