Piezoelectric response to pressure of aluminum nitride thin films prepared on nickel-based superalloy diaphragms

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 6 A, 2006, Pages 5169-5173

  Ohshima, Ichiro ^a   Akiyama, Morito ^a   Kakami, Akira ^a   Tabaru, Tatsuo ^a   Kamohara, Toshihiro ^a   Ooishi, Yasunobu ^a   Noma, Hiroaki ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AlN film; Crystal orientation; Diaphragm; Inconel; Piezoelectric response; Pressure; Superalloy

Indexed keywords

ALUMINUM NITRIDE; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; ELECTRIC CHARGE; MAGNETRON SPUTTERING; PIEZOELECTRICITY; PRESSURE EFFECTS; SUPERALLOYS;

ALN FILMS; DIAPHRAGM; INCONEL; PIEZOELECTRIC RESPONSE;

THIN FILMS;

EID: 33745249522     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.5169     Document Type: Article

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