Modeling and characterization of piezoelectric d33-Mode MEMS energy harvester

Journal of Microelectromechanical Systems

Volumn 19, Issue 5, 2010, Pages 1215-1222

  Park, Jong Cheol ^a   Park, Jae Yeong ^a   Lee, Yoon Pyo ^b  

^a Kwangwoon University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Bulk micromachining; energy harvesting; interdigital electrodes; lead zirconate titanate (PZT) ceramics; microelectromechanical systems (MEMS); piezoelectric effects; vibrations

Indexed keywords

BULK- MICROMACHINING; INTERDIGITAL ELECTRODES; LEAD ZIRCONATE TITANATE (PZT) CERAMICS; MICROELECTROMECHANICAL SYSTEMS; PIEZO-ELECTRIC EFFECTS; VIBRATIONS;

CERAMIC MATERIALS; COMPOSITE MICROMECHANICS; ELECTRODES; FABRICATION; HARVESTERS; HARVESTING; LEAD; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; THIN FILMS; ZIRCONIUM;

ENERGY HARVESTING;

EID: 77957588625     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2067431     Document Type: Article

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