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Volumn 110, Issue 5, 2011, Pages

Chemical and structural investigation of the role of both Mn and Mn oxide in the formation of manganese silicate barrier layers on SiO2

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER LAYERS; LAYER THICKNESS; MANGANESE-SILICATE; MN OXIDES; STRUCTURAL INVESTIGATION; TEM ANALYSIS; THERMAL-ANNEALING; VACUUM-ANNEALING;

EID: 80052945605     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3630123     Document Type: Conference Paper
Times cited : (37)

References (18)
  • 1
    • 80052928313 scopus 로고    scopus 로고
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    • R. Gordon, H. Kim, International Patent No. WO 2009/117670 A2, 24 Sept. (2009).
    • (2009)
    • Gordon, R.1    Kim, H.2
  • 2
    • 33846500355 scopus 로고    scopus 로고
    • 10.1007/s11837-007-0009-4
    • Y. Lee and Y.-L. Kuo, JOM 59, 44 (2007). 10.1007/s11837-007-0009-4
    • (2007) JOM , vol.59 , pp. 44
    • Lee, Y.1    Kuo, Y.-L.2
  • 13
    • 30344434645 scopus 로고    scopus 로고
    • 10.1016/j.apsusc.2005.04.003
    • B. Lescop, Appl. Surf. Sci. 252, 2276 (2006). 10.1016/j.apsusc.2005.04. 003
    • (2006) Appl. Surf. Sci. , vol.252 , pp. 2276
    • Lescop, B.1
  • 18
    • 77951568899 scopus 로고    scopus 로고
    • 10.1063/1.3357392
    • P. Casey and G. Hughes, J. Appl. Phys. 107, 074107 (2010). 10.1063/1.3357392
    • (2010) J. Appl. Phys. , vol.107 , pp. 074107
    • Casey, P.1    Hughes, G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.