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Volumn 110, Issue 5, 2011, Pages
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Chemical and structural investigation of the role of both Mn and Mn oxide in the formation of manganese silicate barrier layers on SiO2
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Author keywords
[No Author keywords available]
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Indexed keywords
BARRIER LAYERS;
LAYER THICKNESS;
MANGANESE-SILICATE;
MN OXIDES;
STRUCTURAL INVESTIGATION;
TEM ANALYSIS;
THERMAL-ANNEALING;
VACUUM-ANNEALING;
MANGANESE OXIDE;
METALLIC COMPOUNDS;
OXIDE FILMS;
SILICATES;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY PHOTOELECTRON SPECTROSCOPY;
MANGANESE;
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EID: 80052945605
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3630123 Document Type: Conference Paper |
Times cited : (37)
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References (18)
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