NOx sensitivity of In2O3 thin film layers with and without promoter layers at high temperatures

Sensors and Actuators, B: Chemical

Volumn 149, Issue 1, 2010, Pages 8-19

  Kannan, S ^a   Rieth, L ^a   Solzbacher, F ^a  

^a University of Utah   (United States)

Author keywords

Gas sensor; Grain size; High temperature; Indium oxide; NOx; Promoters

Indexed keywords

ANNEALED FILMS; AS-DEPOSITED FILMS; COAL BASED POWER PLANTS; DIESEL EXHAUSTS; DIFFERENT THICKNESS; FOUR-POINT PROBE MEASUREMENTS; GAS SENSING PROPERTIES; GAS SENSORS; GRAIN SIZE; HIGH TEMPERATURE; HIGH TEMPERATURE GAS SENSORS; INDIUM OXIDE; MICRO HOTPLATE; OPERATING TEMPERATURE; RESPONSE TIME CONSTANT; SENSOR RESPONSE; THIN FILM LAYERS; TIME CONSTANTS; TIO;

ANNEALING; ARGON; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CHEMICAL DETECTION; CHEMICAL SENSORS; ELECTRIC PROPERTIES; GAS DETECTORS; GAS PLANTS; GAS SENSING ELECTRODES; GASES; GRAIN SIZE AND SHAPE; HIGH TEMPERATURE APPLICATIONS; INDIUM; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

GOLD;

EID: 77955472870     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.06.042     Document Type: Article

References (45)

1. Diesel Exposure Limit - OSHA & MSHA, 2006. Available from: http://www.dieselnet.com/standards/us/ohs.php.
2. E.P.A. Tier 2 Vehicle & Gasoline Sulfur Program - Regulations and Standards 2000 E.P.A
3. A. Gurlo, and R. Riedel Shape-, size- and phase-controlled indium oxide for gas sensing Sensors, 2008 I.E.E.E. 2008 1505 1508
4. 2 with neural signal evaluation Sensors and Actuators B: Chemical 36 1996 353 357 (Pubitemid 126375931)
5. 3 ceramics Sensors and Actuators B: Chemical 103 2004 13 22
6. 3 gas response Thin Solid Films 460 2004 315 323
7. 3 thin films grown by MOCVD Sensors and Actuators B: Chemical 129 2008 467 472
8. 3 synthesis by structure replication and application as a methane gas sensor Advanced Functional Materials 19 2009 653 661
9. 2 Sensors and Actuators B: Chemical 123 2007 779 783
10. 3 thin films Sensors and Actuators B: Chemical 68 2000 249 253
11. 2 detection at low operating temperature Sensors and Actuators B: Chemical 134 2008 133 139
12. 2 sensors fabricated through low frequency AC electrophoretic deposition Sensors and Actuators B: Chemical 146 2010 165 170
13. 2 detection Journal of Nanomaterials 2008
14. 3 nanoparticles prepared by metal organic chemical vapor deposition Sensors and Actuators B: Chemical 130 2008 589 593
15. 2 detection Journal of Sensors 2009 2009
16. x sensing materials Sensors and Actuators B: Chemical 130 2008 707 712
17. N. Barsan, and U. Weimar Conduction model of metal oxide gas sensors Journal of Electroceramics 7 2001 143 167
18. M.J. Madou, and S.R. Morrison Chemical Sensing with Solid State Devices 1989 Academic Press Boston
19. 3-based thin films using an Au or Ti surface modification Sensors and Actuators B: Chemical 78 2001 106 112
20. 2 monitoring Sensors and Actuators B: Chemical 93 2003 509 518
21. 3 semiconductor gas sensors Sensors and Actuators B: Chemical 44 1997 327 333
22. G. Korotcenkov Gas response control through structural and chemical modification of metal oxide films: state of the art and approaches Sensors and Actuators B: Chemical 107 2005 209 232
23. C.D. Butler Test Station for Thin Film High Temperature Gas Sensors 2008 Dept. of Electrical and Computer Engineering, University of Utahpp p. xii, 78 leaves
24. Jeong Characterization of low-resistivity indium oxide films by Auger electron spectroscopy, X-ray photoelectron spectroscopy, and X-ray diffraction and correlation between their properties, composition, and texture Journal of Vacuum Science and Technology A 14 1996
25. 3 thin film gas sensor's response CAS 2005 Proceedings vol. 201 2005 209 212
26. M. Suchea, N. Katsarakis, S. Christoulakis, S. Nikolopoulou, and G. Kiriakidis Low temperature indium oxide gas sensors Sensors and Actuators B: Chemical 118 2006 135 141
27. N. Yamazoe New approaches for improving semiconductor gas sensors Sensors and Actuators B: Chemical 5 1991 7 19
28. A. Galdikas, Z. Kancleris, D. Senuliene, and A. Setkus Influence of heterogeneous reaction rate on response kinetics of metal oxide gas sensors: application to the recognition of an odour Sensors and Actuators B: Chemical 95 2003 244 251
29. A. Setkus Heterogeneous reaction rate based description of the response kinetics in metal oxide gas sensors Sensors and Actuators B: Chemical 87 2002 346 357
30. N. Yamazoe, and K. Shimanoe Theory of power laws for semiconductor gas sensors Sensors and Actuators B: Chemical 128 2008 566 573
31. M. Schweizer-Berberich The effect of Pt and Pd surface doping on the response of nanocrystalline tin oxide gas sensors to CO Sensors and Actuators B: Chemical 31 1996 71 72
32. M. Haruta Size- and support-dependency in the catalysis of gold Catalysis Today 36 1997 153 166
33. 2 Catalysis Today 44 1998 205 213
34. M.A. Chesters, and G.A. Somorjai The chemisorption of oxygen, water and selected hydrocarbons on the (1 1 1) and stepped Au surfaces Surface Science 52 1975 21 28
35. G.C. Bond, and D.T. Thompson Catalysis by gold Catalysis Reviews - Science and Engineering 41 1999 319 388
36. Y.K.M. Yamazoe, and T. Seiyama Effect of additives on semiconductor gas sensors Sensors and Actuators B: Chemical 4 1983 283 289
37. 3 thin film sensor fabricated by micromachining Sensors and Actuators B: Chemical 81 2002 237 247
38. M. Penza, G. Cassano, R. Rossi, A. Rizzo, M.A. Signore, M. Alvisi, N. Lisi, E. Serra, and R. Giorgi Effect of growth catalysts on gas sensitivity in carbon nanotube film based chemiresistive sensors Applied Physics Letters 90 2007 103101 103103
39. 3 thin films activated by noble metals (Pd, Pt, Au) layers Sensors and Actuators B: Chemical 50 1998 52 59
40. G.C. Bond G.J Hutchings, Catalysis by gold (catalytic science) 2006 Imperial College Press pp. 366
41. 2 thin film loaded with nanoscale catalysts for LPG detection Sensors and Actuators B: Chemical 133 2008 270 275
42. 2 thin films deposited by spray pirolysis Thin Solid Films 436 2003 119 126
43. J.F. Mongillo Nanotechnology 101 2007 Greenwood Press Westport, Conn.
44. E. Commini Solid State Gas Sensing first ed. 2008 Springer
45. F. Volkenstein The Electronic Theory of Catalysis on Semiconductors 1963 Pergamon Press Oxford