Ozone sensing properties of thermally evaporated In2 O3-based thin films

Nano

Volumn 3, Issue 4, 2008, Pages 217-222

  Arshak, Khalil ^a   Hickey, G ^a   Forde, E ^a   Harris, J ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

Ozone; Room temperature; Sensor; Thin film

Indexed keywords

BINDING ENERGY; FABRICATION; HIGH TEMPERATURE OPERATIONS; INDIUM; LAPTOP COMPUTERS; MATERIALS PROPERTIES; OZONE; OZONE LAYER; SEMICONDUCTING ZINC COMPOUNDS; TELECOMMUNICATION EQUIPMENT; THIN FILM DEVICES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

COATING SYSTEMS; FABRICATED SENSORS; FABRICATION COSTS; FABRICATION PROCESS; HIGH DEPOSITION RATES; HIGH TEMPERATURES; IMPURITIES IN; INTER-DIGITATED ELECTRODES; MIXED OXIDES; OZONE CONCENTRATIONS; OZONE MONITORING; PORTABLE DEVICES; REDUCED POWER CONSUMPTION; ROOM TEMPERATURE; ROOM-TEMPERATURE OPERATIONS; SAFETY LEVELS; SENSING PROPERTIES; THIN OXIDE LAYERS; THIN SENSING LAYERS; WORLD HEALTH ORGANIZATIONS; X-RAY PHOTOS; XPS; XPS ANALYSIS; ZNO;

SENSORS;

EID: 61349148075     PISSN: 17932920     EISSN: None     Source Type: Journal    
DOI: 10.1142/S1793292008001039     Document Type: Conference Paper

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