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Volumn 47, Issue 23, 2008, Pages 11405-11416

Synthesis, characterization, and thermal properties of homoleptic rare-earth guanidinates: Promising precursors for MOCVD and ALD of rare-earth oxide thin films

Author keywords

[No Author keywords available]

Indexed keywords


EID: 57949107450     PISSN: 00201669     EISSN: None     Source Type: Journal    
DOI: 10.1021/ic801432b     Document Type: Article
Times cited : (58)

References (59)
  • 12
    • 57949089702 scopus 로고    scopus 로고
    • The International Technology Roadmap for Semiconductors, Semiconductor Industry Association
    • The International Technology Roadmap for Semiconductors, Semiconductor Industry Association, 2007. http://public.itrs.net.
    • (2007)
  • 59
    • 57949101329 scopus 로고    scopus 로고
    • Ph.D. Thesis, Helsinki University of Technology, Espoo
    • Päiväsaari, J. Ph.D. Thesis, Helsinki University of Technology, Espoo, 2006.
    • (2006)
    • Päiväsaari, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.