Dependences of the Al thickness and annealing temperature on the structural, optical and electrical properties in ZnO/Al multilayers

Thin Solid Films

Volumn 497, Issue 1-2, 2006, Pages 130-134

  Hu, Y M ^a   Lin, C W ^b   Huang, J C A ^a,b  

^a NATIONAL UNIVERSITY OF KAOHSIUNG   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Multilayers; Resistivity; Sputtering; Zinc oxide

Indexed keywords

ALUMINUM; ANNEALING; ELECTRIC CONDUCTIVITY; SPUTTERING; TEMPERATURE DISTRIBUTION; THICKNESS MEASUREMENT; ZINC OXIDE;

ANNEALING TEMPERATURE; ATOMIC LAYER; ION-BEAM SPUTTERING; LOW RESISTIVITY;

MULTILAYERS;

EID: 30344475820     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.10.058     Document Type: Article

References (18)

1. H.L. Hartnagel, A.L. Dawar, A.K. Jain, and C. Jagadish Semiconducting Transparent Thin Films 1995 Institute of Physics Publishing Bristol
2. T. Minami Mater. Res. Soc. Bull. 25 2000 38
3. K. Ellmer J. Phys., D, Appl. Phys. 34 2001 3097
4. R. Wang, L.H. King, and A.W. Sleight J. Mater. Res. 11 1996 1659
5. Y. Nakanishi, A. Miyake, and H. Kominami Appl. Surf. Sci. 142 1999 233
6. J. Hu, and R.G. Gordon J. Appl. Phys. 71 1992 880
7. H. Agura, A. Suzuki, T. Matsushita, T. Aoki, and M. Okuda Thin Solid Films 445 2003 263
8. B.J. Lokhande, and M.D. Uplane Appl. Surf. Sci. 167 2000 243
9. W. Tang, and D.C. Cameron Thin Solid Films 238 1 1994 83
10. K. Ellmer J. Phys., D, Appl. Phys. 33 2000 R17
11. X. Wu, T.J. Coutts, and W.P. Mulligan J. Vac. Sci. Technol., A, Vac. Surf. Films 15 1997 1057
12. J.M.E. Harper J.L. Vossen W. Kern Thin Film Processes 1978 Academic Press New York 175 Ch. II-5
13. J.E.E. Baglin J.J. Cuomo S.M. Rossnagel H.R. Kaufman Handbook of Ion Beam Processing Technology 1989 Noyes Publications Park Ridge, NJ Ch. 14
14. J. Kioke, K. Shimoe, and H. Ieki Jpn. J. Appl. Phys. Part 1 32 1993 2337
15. D.M. Bagnall, Y.F. Chen, Z. Zhu, T. Yao, S. Koyama, M.Y. Shen, and T. Goto Appl. Phys. Lett. 70 1997 2230
16. H. Kim, J.S. Horwitz, S.B. Qadri, and D.B. Chrisey Thin Solid Films 420-421 2002 107
17. L. Burstein Phys. Rev. 93 1954 632
18. Y. Qu, T.A. Gessert, K. Ramanathan, R.G. Dhere, R. Noufi, and T.J. Coutts J. Vac. Sci. Technol., A, Vac. Surf. Films 11 1993 996