Influence of ZnO buffer layer on AZO film properties by radio frequency magnetron sputtering

Journal of the European Ceramic Society

Volumn 28, Issue 16, 2008, Pages 3065-3070

  Hsu, C Y ^a   Ko, T F ^b   Huang, Y M ^b  

^a LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

AZO; Grey relational analysis; Surface roughness; ZnO buffer layer

Indexed keywords

ANNEALING; BUFFER LAYERS; CONDUCTIVE FILMS; ELECTRIC RESISTANCE; ELECTROMAGNETIC WAVES; MAGNETRON SPUTTERING; MAGNETRONS; OPTICAL MATERIALS; OPTICAL PROPERTIES; OPTICAL WAVEGUIDES; OXIDE FILMS; RADIO; RADIO WAVES; SEMICONDUCTING ZINC COMPOUNDS; TAGUCHI METHODS; ZINC; ZINC ALLOYS; ZINC OXIDE;

AZO; GREY RELATIONAL ANALYSIS; SURFACE ROUGHNESS; ZNO BUFFER LAYER; ZNO BUFFER LAYERS;

OPTICAL FILMS;

EID: 51749085079     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2008.05.008     Document Type: Article

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