Growth and characterization of indium tin oxide thin films deposited on PET substrates

Thin Solid Films

Volumn 516, Issue 7, 2008, Pages 1634-1639

  Lee, Jaehyeong ^a   Jung, Hakkee ^a   Lee, Jongin ^a   Lim, Donggun ^b   Yang, Keajoon ^b   Yi, Junsin ^c   Song, Woo Chang ^d  

^a Kunsan National University   (South Korea)

^b Chungju National University   (South Korea)

^c Sungkyunkwan University   (South Korea)

^d Kangwon National University   (South Korea)

Author keywords

Electrical properties; Indium tin oxide (ITO); Optical properties; Polyethylene terephthalate (PET); Sputtering

Indexed keywords

FILM GROWTH; MAGNETRON SPUTTERING; OXIDE FILMS; POLYETHYLENE TEREPHTHALATES; THIN FILMS;

FILM FORMATION PROCESSES; FLEXIBLE DISPLAYS; INDIUM TIN OXIDE; SPUTTERING POWER;

TIN OXIDES;

EID: 38649130234     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.05.028     Document Type: Article

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