Amorphous carbon film deposition on the inner surface of tubes using atmospheric pressure pulsed filamentary plasma source

Journal of Physics D: Applied Physics

Volumn 44, Issue 35, 2011, Pages

  Pothiraja, Ramasamy ^a   Bibinov, Nikita ^a   Awakowicz, Peter ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITED FILMS; FILM-DEPOSITION PROCESS; FT-IR-ATR; INNER DIAMETERS; INNER SURFACES; LASER SCANNING MICROSCOPE; OUTER DIAMETERS; PLASMA FILAMENTS; PLASMA PARAMETER; QUARTZ TUBES; SCANNING ELECTRON MICROSCOPE; XPS ANALYSIS; XRD;

AMORPHOUS FILMS; ATMOSPHERIC PRESSURE; CARBON FILMS; EMISSION SPECTROSCOPY; HYDROGENATION; METHANE; OPTICAL EMISSION SPECTROSCOPY; PHOTOGRAPHY; PLASMA DEPOSITION; PLASMA SOURCES; QUARTZ; SCANNING ELECTRON MICROSCOPY;

AMORPHOUS CARBON;

EID: 80051943309     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/35/355206     Document Type: Article

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