Preparation of Ti O2 thin films on the inner surface of a quartz tube using atmospheric-pressure microplasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 3, 2008, Pages 338-343

  Yoshiki, Hiroyuki ^a   Saito, Taku ^a  

^a TSURUOKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ATMOSPHERIC-PRESSURE MICROPLASMA; PLASMA GAS PHASE; QUARTZ TUBE; TITANIUM TETRAISOPROPOXIDE;

TITANIUM DIOXIDE;

EID: 42949173542     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2891251     Document Type: Article

References (18)

1. R. Prat, Y. J. Koh, Y. Babukutty, M. Kogoma, S. Okazaki, and M. Kodama, Polymer 41, 7355 (2000).
2. H. Yoshiki, K. Abe, and T. Mitsui, Thin Solid Films 515, 1394 (2006).
3. H. Fujiyama, Surf. Coat. Technol. 131, 278 (2000).
4. H. Yoshiki, A. Oki, H. Ogawa, and Y. Horiike, J. Vac. Sci. Technol. A 20, 24 (2002).
5. J. K. Evju, P. B. Howell, L. E. Locascio, M. J. Tarlov, and J. J. Hickman, Appl. Phys. Lett. 84, 1668 (2004).
6. M. Kadowaki, H. Yoshizawa, S. Mori, and M. Suzuki, Thin Solid Films 506-507, 123 (2006).
7. H. K. Pulker, G. Paesold, and E. Ritter, Appl. Opt. 15, 2986 (1976).
8. K. Hashimoto, H. Irie, and A. Fujishima, Jpn. J. Appl. Phys., Part 1 44, 8269 (2005).
9. H. J. Frenck, W. Kulisch, M. Kuhr, and R. Kassing, Thin Solid Films 201, 327 (1991).
10. W. G. Lee, S. I. Woo, J. C. Kim, S. H. Choi, and K. H. Oh, Thin Solid Films 237, 105 (1994).
11. S. S. Huang and J. S. Chen, J. Mater. Sci. 13, 77 (2002).
12. H. Yoshiki and Y. Horiike, Jpn. J. Appl. Phys., Part 2 40, L360 (2001).
13. T. Yokoyama, M. Kogoma, T. Moriwaki, and S. Okazaki, J. Phys. D 23, 1125 (1990).
14. D. A. Huchital and R. T. Mckeon, Appl. Phys. Lett. 20, 158 (1972).
15. L. Ramqvist, K. Hamrin, G. Johansson, A. Fahlman, and C. Nordling, J. Phys. Chem. Solids 30, 1835 (1969).
16. N. S. McIntyre, in Practical Surface Analysis, edited by, D. Briggs, and, M. P. Seah, (Wiley, New York, 1983), p. 410.
17. C. P. Fictorie, J. F. Evans, and W. L. Gladfelter, J. Vac. Sci. Technol. A 12, 1108 (1994).
18. F. C. Eversteyn, P. J. W. Severin, C. H. J. van der Brekel, and H. L. Peek, J. Electrochem. Soc. 117, 925 (1970).