SCOPUS 정보 검색 플랫폼

Volumn , Issue 15, 2009, Pages 1978-1980

Hafnium carbamates and ureates: New class of precursors for low-temperature growth of HfO2 thin films

(8) Pothiraja, Ramasamy a Milanov, Andrian P a Barreca, Davide b Gasparotto, Alberto c Becker, Hans Werner a Winter, Manuela a Fischer, Roland A a Devi, Anjana a

a RUHR UNIVERSITY BOCHUM (Germany)

b CNR (Italy)

c UNIVERSITY OF PADOVA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBAMIC ACID DERIVATIVE; HAFNIUM; HAFNIUM DIOXIDE; HAFNIUM ETHYLMETHYLAMIDE; HAFNIUM ISOPROPOXIDE; ISOCYANIC ACID DERIVATIVE; UNCLASSIFIED DRUG; UREA;

ARTICLE; CRYSTAL STRUCTURE; FILM; LOW TEMPERATURE; STOICHIOMETRY; TEMPERATURE DEPENDENCE;

EID: 63849261284 PISSN: 13597345 EISSN: None Source Type: Journal
DOI: 10.1039/b821128k Document Type: Article

Times cited : (17)

References (23)

1
- 0000983812
- K. Kukli M. Ritala T. Sajavaara J. Keinonen M. Leskela Chem. Vap. Deposition 2002 8 199
- (2002) Chem. Vap. Deposition , vol.8 , pp. 199
- Kukli, K.¹ Ritala, M.² Sajavaara, T.³ Keinonen, J.⁴ Leskela, M.⁵

2
- 0000214962
- M. Balog M. Schieber M. Michman S. Patai Thin Solid Films 1977 41 247
- (1977) Thin Solid Films , vol.41 , pp. 247
- Balog, M.¹ Schieber, M.² Michman, M.³ Patai, S.⁴

3
- 1242265241
- S. Ramanathan P. C. McIntyre S. Guha E. Gusev Appl. Phys. Lett. 2004 84 389
- (2004) Appl. Phys. Lett. , vol.84 , pp. 389
- Ramanathan, S.¹ McIntyre, P.C.² Guha, S.³ Gusev, E.⁴

4
- 63849237189
- S. V. Volkov A. V. Grafov G. A. Battiston L. A. Koval R. Gerbasi M. Porchia P. Zanella E. A. Mazurenko Proc.-Electrochem. Soc. 1997 97-25 455
- (1997) Proc.-Electrochem. Soc. , vol.9725 , pp. 455
- Volkov, S.V.¹ Grafov, A.V.² Battiston, G.A.³ Koval, L.A.⁴ Gerbasi, R.⁵ Porchia, M.⁶ Zanella, P.⁷ Mazurenko, E.A.⁸

5
- 27944440926
- J. W. Seo Ch. Dieker J.-P. Locquet G. Mavrou A. Dimoulas Appl. Phys. Lett. 2005 87 221906
- (2005) Appl. Phys. Lett. , vol.87 , pp. 221906
- Seo, J.W.¹ Dieker, Ch.² Locquet, J.-P.³ Mavrou, G.⁴ Dimoulas, A.⁵

6
- 0001716014
- C. T. Kuo R. Kwor K. M. Jones Thin Solid Films 1992 213 257
- (1992) Thin Solid Films , vol.213 , pp. 257
- Kuo, C.T.¹ Kwor, R.² Jones, K.M.³

7
- 12344261411
- Y. Aoki T. Kunitake A. Nakao Chem. Mater. 2005 17 450
- (2005) Chem. Mater. , vol.17 , pp. 450
- Aoki, Y.¹ Kunitake, T.² Nakao, A.³

8
- 4143095954
- A. Baunemann R. Thomas R. Becker M. Winter R. A. Fischer P. Ehrhart R. Waser A. Devi Chem. Commun. 2004 1610
- (2004) Chem. Commun. , pp. 1610
- Baunemann, A.¹ Thomas, R.² Becker, R.³ Winter, M.⁴ Fischer, R.A.⁵ Ehrhart, P.⁶ Waser, R.⁷ Devi, A.⁸

9
- 0004242252
- Academic Press, New York
- D. C. Bradley, R. C. Mehrotra and G. P. Gaur, Metal Alkoxides, Academic Press, New York, 1978
- (1978) Metal Alkoxides
- Bradley, D.C.¹ Mehrotra, R.C.² Gaur, G.P.³

10
- 0036504040
- K. J. Choi W. C. Shin S. G. Yoon J. Electrochem. Soc. 2002 149 F18
- (2002) J. Electrochem. Soc. , vol.149 , pp. 18
- Choi, K.J.¹ Shin, W.C.² Yoon, S.G.³

11
- 33846624784
- A. Milanov R. Bhakta A. Baunemann H.- W. Becker R. Thomas P. Ehrhart M. Winter A. Devi Inorg. Chem. 2006 45 11008
- (2006) Inorg. Chem. , vol.45 , pp. 11008
- Milanov, A.¹ Bhakta, R.² Baunemann, A.³ Becker H -, W.⁴ Thomas, R.⁵ Ehrhart, P.⁶ Winter, M.⁷ Devi, A.⁸

12
- 58149479476
- R. Pothiraja A. Milanov H. Parala M. Winter R. A. Fischer A. Devi Dalton Trans. 2009 654
- (2009) Dalton Trans. , pp. 654
- Pothiraja, R.¹ Milanov, A.² Parala, H.³ Winter, M.⁴ Fischer, R.A.⁵ Devi, A.⁶

13
- 13444311929
- C. J. Carmalt A. C. Newport S. A. O'Neill I. P. Parkin A. J. P. White D. J. Williams Inorg. Chem. 2005 44 615
- (2005) Inorg. Chem. , vol.44 , pp. 615
- Carmalt, C.J.¹ Newport, A.C.² O'Neill, S.A.³ Parkin, I.P.⁴ White, A.J.P.⁵ Williams, D.J.⁶

14
- 33751260392
- R. Murugavel M. P. Singh Inorg. Chem. 2006 45 9154
- (2006) Inorg. Chem. , vol.45 , pp. 9154
- Murugavel, R.¹ Singh, M.P.²

15
- 4644332194
- K. Hsieh W. Lee C. Lai C. Hu H. M. Lee J. Huang S. Peng G. J. Lee J. Organomet. Chem. 2004 689 3362
- (2004) J. Organomet. Chem. , vol.689 , pp. 3362
- Hsieh, K.¹ Lee, W.² Lai, C.³ Hu, C.⁴ Lee, H.M.⁵ Huang, J.⁶ Peng, S.⁷ Lee, G.J.⁸

16
- 33748943792
- K. V. Zherikova N. B. Morozova N. V. Kuratieva I. A. Baidina I. K. Igumenov J. Struct. Chem. 2005 46 1039
- (2005) J. Struct. Chem. , vol.46 , pp. 1039
- Zherikova, K.V.¹ Morozova, N.B.² Kuratieva, N.V.³ Baidina, I.A.⁴ Igumenov, I.K.⁵

17
- 33746565531
- G. I. Spijksma H. J. M. Bouwmeester D. H. A. Blank A. Fischer M. Henry V. G. Kessler Inorg. Chem. 2006 45 4938
- (2006) Inorg. Chem. , vol.45 , pp. 4938
- Spijksma, G.I.¹ Bouwmeester, H.J.M.² Blank, D.H.A.³ Fischer, A.⁴ Henry, M.⁵ Kessler, V.G.⁶

18
- 2042513615
- S. V. Pasko L. G. Hubert-Pfalzgraf A. Abrutis P. Richard A. Bartasyte V. Kazlauskiene J. Mater. Chem. 2004 14 1245
- (2004) J. Mater. Chem. , vol.14 , pp. 1245
- Pasko, S.V.¹ Hubert-Pfalzgraf, L.G.² Abrutis, A.³ Richard, P.⁴ Bartasyte, A.⁵ Kazlauskiene, V.⁶

19
- 33750742769
- K. V. Zherikova N. B. Morozova E. V. Peresypkina I. A. Baidina I. K. Igumenov J. Struct. Chem. 2006 47 570
- (2006) J. Struct. Chem. , vol.47 , pp. 570
- Zherikova, K.V.¹ Morozova, N.B.² Peresypkina, E.V.³ Baidina, I.A.⁴ Igumenov, I.K.⁵

20
- 19944365539
- Y. F. Loo R. O'Kane A. C. Jones H. C. Aspinall R. J. Potter P. R. Chalker J. F. Bickley S. Taylor L. M. Smith J. Mater. Chem. 2005 15 1896
- (2005) J. Mater. Chem. , vol.15 , pp. 1896
- Loo, Y.F.¹ O'Kane, R.² Jones, A.C.³ Aspinall, H.C.⁴ Potter, R.J.⁵ Chalker, P.R.⁶ Bickley, J.F.⁷ Taylor, S.⁸ Smith, L.M.⁹

21
- 0003459529
- J. Chastain, Perkin Elmer Corporation, Eden Prairie, MN
- J. F. Moulder, W. F. Stickle, P. E. Sobol and K. D. Bomben, Handbook of X-Ray Photoelectron Spectroscopy, ed., J. Chastain, Perkin Elmer Corporation, Eden Prairie, MN, 1992
- (1992) Handbook of X-Ray Photoelectron Spectroscopy, Ed.
- Moulder, J.F.¹ Stickle, W.F.² Sobol, P.E.³ Bomben, K.D.⁴

22
- 33646585336
- L. Armelao S. Gross A. Zattin E. Tondello Surf. Sci. Spectra 2003 10 150
- (2003) Surf. Sci. Spectra , vol.10 , pp. 150
- Armelao, L.¹ Gross, S.² Zattin, A.³ Tondello, E.⁴

23
- 49349086963
- and references therein;
- G. Carta N. El Habra G. Rossetto G. Torzo L. Crociani M. Natali P. Zanella G. Cavinato V. Matterello V. Rigato S. Kaciulis A. Mezzi Chem. Vap. Deposition 2007 13 626
- (2007) Chem. Vap. Deposition , vol.13 , pp. 626
- Carta, G.¹ El Habra, N.² Rossetto, G.³ Torzo, G.⁴ Crociani, L.⁵ Natali, M.⁶ Zanella, P.⁷ Cavinato, G.⁸ Matterello, V.⁹ Rigato, V.¹⁰ Kaciulis, S.¹¹ Mezzi, A.¹²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.