Inner coating of long-narrow tube by plasma sputtering

Surface and Coatings Technology

Volumn 131, Issue 1-3, 2000, Pages 278-283

  Fujiyama, Hiroshi ^a  

^a NAGASAKI UNIVERSITY   (Japan)

Author keywords

ECR plasma; Inside coating of tube; Magnetron plasma; Sputter coating

Indexed keywords

CORROSION RESISTANCE; INTERNAL COATING; PIPE; PLASMA TREATMENT; SPUTTERING;

EID: 0034532524     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00801-X     Document Type: Conference Paper

References (16)