Application of a positioning and measuring machine for metrological long-range scanning force microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5878, Issue , 2005, Pages 1-12

  Hausotte, T ^a   Jager G ^a   Manske, E ^a   Hofmann, N ^a   Dorozhovets, N ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Interferometer; Long range scanning force microscopy; Nanomeasuring; Nanopositioning

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTERFEROMETRY; OPTICAL SENSORS; PIEZOELECTRIC DEVICES;

LONG-RANGE SCANNING FORCE MICROSCOPY; NANOMEASURING; NANOPOSITIONING;

SCANNING;

EID: 29244489262     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.620882     Document Type: Conference Paper

References (12)

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