Dimensional nanometrology at PTB -a survey;Dimensionelle nanometrologie in der PTB - Eine übersicht

Technisches Messen

Volumn 73, Issue 1, 2006, Pages 4-18

  Bosse, Harald ^a   Wilkening, Günter ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Dimensions; Measurement standards; Nanotechnology; Sensor surface interactions

Indexed keywords

DIMENSIONAL NANOMETROLOGY; DIMENSIONS; MEASUREMENT STANDARDS; PHYSICAL AND CHEMICAL CHARACTERISTICS; PHYSICAL AND CHEMICAL PROPERTIES; PHYSICAL DIMENSIONS; PHYSICAL PHENOMENA; SENSOR-SURFACE-INTERACTIONS;

NANOTECHNOLOGY;

SENSORS;

EID: 33746094678     PISSN: 01718096     EISSN: 01718096     Source Type: Journal    
DOI: 10.1524/teme.2006.73.1.4     Document Type: Review

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