Metrological scanning probe microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6188, Issue , 2006, Pages

  Dorozhovets, N ^a   Hausotte, T ^a   Manske, E ^a   Jager G ^a   Hofmann, N ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

AFM; Atomic force microscope; Interferometer; Metrological scanning probe microscope; SPM

Indexed keywords

ATOMIC FORCE MICROSCOPY; IMAGE ANALYSIS; INTERFEROMETERS; NANOTECHNOLOGY; POSITION MEASUREMENT; SCANNING; SENSORS;

METROLOGICAL SCANNING PROBE MICROSCOPE; NANOMETRE PRECISION; NANOPOSITIONING; OBJECT MEASUREMENT; SENSOR TECHNOLOGY; SPM;

MICROSCOPIC EXAMINATION;

EID: 33746698389     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.664407     Document Type: Conference Paper

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