Nanomeasuring and nanopositioning engineering

Measurement: Journal of the International Measurement Confederation

Volumn 43, Issue 9, 2010, Pages 1099-1105

  Jager G ^a   Hausotte, T ^a   Manske, E ^a   Buchner H J ^a   Mastylo, R ^a   Dorozhovets, N ^a   Hofmann, N ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Nanometrology; Nanoprobes; NPM Machines; Plan mirror interferometers

Indexed keywords

ABBE OFFSET; AFM; DOUBLE-BEAM; FOCUS SENSORS; GERMANY; GUIDE SYSTEM; HIGH-PRECISION; LONG RANGE; MEASUREMENT RESULTS; MEASURING RANGES; MECHANICAL PRECISION; NANO-POSITIONING; NANO-STRUCTURING; NANOMEASURING; NANOMETROLOGY; NANOPOSITIONING AND NANOMEASURING MACHINES; NANOTOOLS; NEW MATERIAL; NPM-MACHINES; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; PLAN MIRROR INTERFEROMETERS; PROBE SYSTEMS; PROCESS MEASUREMENTS; RESEARCH INSTITUTES; SENSOR TECHNOLOGIES; SINGLE BEAM; SIX DEGREES OF FREEDOM; TACTILE PROBES; WAFER INSPECTION; WHITE LIGHT; WORK PIECES;

GENETIC ENGINEERING; INTERFEROMETERS; METAL FOIL; MIRRORS; NANOPROBES; PROBES; SCANNING PROBE MICROSCOPY; SENSORS; SYSTEMATIC ERRORS; UNCERTAINTY ANALYSIS;

PRECISION ENGINEERING;

EID: 77956060896     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.measurement.2010.04.008     Document Type: Article

References (7)

1. G. Jäger, E. Manske, T. Hausotte, W. Schott, Operation and analysis of a nanopositioning and nanomeasuring machine, in: Proceedings of the 17th Annual Meeting of the ASPE, St. Louis, Missouri, USA, 2002, pp. 299-304.
2. G. Jäger, E. Manske, T. Hausotte, H. Büchner, R. Grünwald, R. Füßl, Application of miniature interferometers to nanomeasuring and nanopositioning devices, in: Proceedings of the Conference Scanning Probe Microscopy, Sensors and Nanostructures (TEDA), Beijing, China, Mai 2004, pp. 23-24.
3. G. Jäger, E. Manske, T. Hausotte, R. Füßl, R. Grünwald, H. Büchner, W. Schott, D. Dontsov, Miniature interferometers developed for applications in nano-devices, in: Proceedings of the 7th International Conference on Mechatronic Technology, ICMT 2003 Taipei, Taiwan, December 2003, pp. 41-45.
4. H.-J. Büchner, G. Jäger, Interferometrische Messverfahren zur berührungslosen und quasi punktförmigen Antastung von Messoberflächen, Technisches Messen, vol. 59, issue no 2, 1992, pp. 43-47.
5. H.-J. Büchner, G. Jäger, Plan mirror interferometer for precision length measurements, in: Proceedings of the Euspen-Conference 2005, Montpellier, Frankreich, Mai 2005, pp. 45-48.
6. R. Mastylo, E. Manske, G. Jäger, Development of a Focus Sensor and its Integration into the Nanopositioning and Nanomeasuring Machine, OPTO 2004, 25-27.05.2004, Nürnberg, Proceedings, pp. 123-126.
7. N. Dorozhovets, T. Hausotte, N. Hofmann, E. Manske, G. Jäger, Development of the Interferometrical Scanning Probe Microscopy, SPIE Optics & Photonics, San Diego, USA, 2006.