XPS structure analysis of TiN/TiC bilayers produced by pulsed vacuum arc discharge;Análisis estructural de bicapas de TiN/TiC producidas por descargas pulsadas por arco en vacío

DYNA (Colombia)

Volumn 77, Issue 163, 2010, Pages 64-74

  Parra, Elisabeth Restrepo ^a   Arango, Pedro Jose Arango ^a   Palacio, Vicente Javier Benavides ^a  

^a UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

Author keywords

Chemical composition; Depth profiles; PAPVD; Stoichiometry; XPS

Indexed keywords

EID: 80051557882     PISSN: 00127353     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (55)

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