Advanced vacuum arc metal ion implantation systems

Surface and Coatings Technology

Volumn 96, Issue 1, 1997, Pages 1-8

  Treglio, James R ^a   Elkind, Alexander ^a   Stinner, Robert J ^a   Perry, Anthony J ^a,b  

^a ISM Technologies Inc   (United States)

^b AIMS Marketing   (United States)

Author keywords

Industrial ion implantation; Metal ion source; Surface technology; MEVVA

Indexed keywords

CATHODES; COMPUTER CONTROL SYSTEMS; ELECTRIC CURRENTS; ELECTRIC POWER SUPPLIES TO APPARATUS; INDUSTRIAL APPLICATIONS; ION SOURCES; METALS; SURFACE TREATMENT; TECHNOLOGY;

ADVANCED VACUUM ARC ION SOURCE; CATHODIC ARC METAL ION IMPLANTATION SYSTEM; SURFACE TECHNOLOGY;

ION IMPLANTATION;

EID: 0031551602     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)80006-6     Document Type: Article

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