Preparation of composite and compositionally graded TiC-TiN films by liquid injection plasma-enhanced CVD

Solid State Ionics

Volumn 172, Issue 1-4 SPEC. ISS., 2004, Pages 249-252

  Takahashi, Masateru ^a   Shimada, Shiro ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Alkoxide solution; Compositionally graded; Film; PECVD; Ti(C,N)

Indexed keywords

AMINES; COMPOSITION; MORPHOLOGY; PARTICLE SIZE ANALYSIS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SOLUTIONS; TITANIUM CARBIDE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ALKOXIDE SOLUTION; COLUMNAR STRUCTURE; COMPOSITIONALLY GRADED; TI(C,N);

THIN FILMS;

EID: 7544231033     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssi.2004.03.015     Document Type: Conference Paper

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