Improvement of mechanical properties of Ti/TiN multilayer film deposited by sputtering

Surface and Coatings Technology

Volumn 140, Issue 2, 2001, Pages 122-127

  Mori, T ^a   Fukuda, S ^a   Takemura, Y ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Magnetron sputtering; Multi layer film; Ti TiN

Indexed keywords

CATHODES; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; MULTILAYERS; STRAIN; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

ADVANCED FUNCTIONAL COATINGS;

PROTECTIVE COATINGS;

INORGANIC COATING; MECHANICAL PROPERTY; SPUTTERING; TITANIUM; TITANIUM NITRIDE;

EID: 0035972906     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01021-0     Document Type: Article

References (4)

1. Smith D.L. Thin-film deposition. 1995;McGraw-Hill.
2. Francombe M.H., Vossen J.L. Physics of Thin Films. 1994;Academic Press.
3. Pelleg J., Zevin L.Z., Lungo S. Thin Solid Films. 197:1991;117-128.
4. Backofen W.A. Deformation Processing, Chap. 4. 1972;72 Addison-Wesley, Massachusetts.