Diamond-on-polymer microelectrode arrays fabricated using a chemical release transfer process

Journal of Microelectromechanical Systems

Volumn 20, Issue 4, 2011, Pages 867-875

  Hess, Allison E ^a   Sabens, David M ^a   Martin, Heidi B ^a   Zorman, Christian A ^a  

^a Case Western Reserve University   (United States)

Author keywords

Diamond; flexible structures; neural probe

Indexed keywords

CHEMICAL RELEASE; DIAMOND ELECTRODE; ELECTRICAL TESTING; ELECTRODE ARRAYS; ELECTRODE IMPEDANCE; FLEXIBLE DEVICE; MECHANICAL CHARACTERISTICS; MICROELECTRODE ARRAY; NEURAL PROBES; PERIPHERAL NERVES; POST-ANNEAL; TEMPERATURE-SENSITIVE; TRANSFER PROCESS;

FABRICATION; FLEXIBLE STRUCTURES; MECHANICAL TESTING; MICROELECTRODES; OHMIC CONTACTS; POLYMERS; PROBES; STRUCTURE (COMPOSITION);

DIAMONDS;

EID: 79961207286     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2159099     Document Type: Article

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