A high-yield microassembly structure for three-dimensional microelectrode arrays

IEEE Transactions on Biomedical Engineering

Volumn 47, Issue 3, 2000, Pages 281-289

  Bai, Qing ^a   Wise, Kensall D ^b   Anderson, David J ^b  

^a BOSTON SCIENTIFIC CORPORATION   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Active recording; Microassembly; Neural probe; Neural recording; Neural sensor; Orthogonal lead transfers; Three dimensional microstructure

Indexed keywords

BRAIN; CMOS INTEGRATED CIRCUITS; FUNCTIONAL NEURAL STIMULATION; MEDICAL APPLICATIONS; NEUROPHYSIOLOGY; PROBES; SENSORS; SIGNAL PROCESSING;

ACTIVE RECORDING; CENTRAL NERVOUS SYSTEM; MICROASSEMBLY; NEURAL PROBE; NEURAL RECORDING; NEURAL SENSOR; ORTHOGONAL LEAD TRANSFER; THREE DIMENSIONAL MICROELECTRODE ARRAY; WIRE FREE ULTRASONIC BONDING;

MICROELECTRODES;

ANIMAL EXPERIMENT; ARTICLE; AUDITORY CORTEX; CENTRAL NERVOUS SYSTEM; GUINEA PIG; MICROELECTRODE; NONHUMAN; SENSOR; THREE DIMENSIONAL IMAGING; ULTRASOUND;

ANIMALS; AUDITORY CORTEX; BRAIN; CATS; ELECTRODES, IMPLANTED; ELECTROENCEPHALOGRAPHY; EQUIPMENT DESIGN; GOLD; GUINEA PIGS; MICROELECTRODES; MICROSCOPY, CONFOCAL; SIGNAL PROCESSING, COMPUTER-ASSISTED; SILICON;

EID: 0034055301     PISSN: 00189294     EISSN: None     Source Type: Journal    
DOI: 10.1109/10.827288     Document Type: Article

References (19)

1. K. Najafi, K. D. Wise, and T. Mochizuki, "A high-yield IC-compatible multichannel recording array," IEEE Trans. Electron Devices, vol. 32, pp. 1206-1211, July 1985.
2. A. Bragin, G. Jando, Z. Nadasdy, J. Hetke, K. Wise, and G. Buzsaki, "Gamma (40-100 Hz) oscillation in the hippocampus of the behaving rat," J. Neuroscience, vol. 15, pp. 47-60, Jan. 1995.
3. R. R. Carter and J. C. Houk, "Multiple single-unit recordings from the CNS using thin-film electrode arrays," IEEE Trans. Rehab. Eng. , vol. 1, pp. 175-184, Sept. 1993.
4. J. Ji and K. D. Wise, "An implantable CMOS circuit interface for multiplexed microelectrode recording arrays," IEEE J. Solid-State Circuits, vol. 27, pp. 433-443, Mar. 1992.
5. J. L. Lund and K. D. Wise, "Chip-level encapsulation of implantable CMOS microelectrode arrays," in Dig. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1994, pp. 29-32.
6. C. Kim and K. D. Wise, "A 64-site multiplexed low-profile neural probe with on-chip CMOS circuitry," in Dig. 1994 IEEE Symp. VLSI Circuits, Honolulu, HI, June 1994.
7. J. F. Hetke, J. L. Lund, K. Najafi, K. D. Wise, and D. J. Anderson, "Silicon ribbon cables for chronically implantable microelectrode arrays," IEEE Trans. Biomed. Eng. , vol. 41, pp. 314-321, Apr. 1994.
8. P. K. Campbell, K. E. Jones, R. J. Huber, K. W. Horch, and R. A. Normann, "A silicon-based three-dimensional neural interface: Manufacturing processes for an intracortical electrode array," IEEE Trans. Biomed. Eng. , vol. 38, pp. 758-767, Aug. 1991.
9. T. A. Frieswijk and W. L. C. Rutten, "Three-dimensional neuroelectronic interface for peripheral nerve stimulation and recording: Realization steps and contacting technology," in Proc. 16th Annu. Int. Conf. IEEE EMBS, 1994, [CD-ROM], Paper 449.
10. J. A. Bielen, A. W. Schmidt, R. Weiel, and W. L. C. Rutten, "Fabrication of multi-electrode array structures for inter-neural stimulation: Assessment of the LIGA method," in Proc. 18th Annu. Int. Conf. IEEE EMBS, 1996, [CD-ROM], Paper 1010.
11. A. C. Hoogerwerf and K. D. Wise, "A three-dimensional microelectrode array for chronic neural recording," IEEE Trans. Biomed. Eng., vol. 41, pp. 1136-1146, Dec. 1994.
12. Q. Bai and K. D. Wise, "A high-yield process for three-dimensional microelectrode arrays," in Dig. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1996, pp. 262-265.
13. M. P. Lepselter, "Beam-lead technology," Bell Syst. Tech. J., vol. 45, pp. 233-254, Feb. 1966.
14. D. J. Edell, V. Van Toi, V. M. McNeil, and L. D. Clark, "Factors influencing the biocompatibility of insertable silicon microshafts in cerebral cortex," IEEE Trans. Biomed. Eng. , vol. 39, pp. 635-643, 1992.
15. P. J. Rousche and R. A. Normann, "A method for pneumatically inserting an array of penetrating electrodes into cortical tissue," Annu. Biomed. Eng. , vol. 20, pp. 413-422, 1992.
16. J. P. A. Smit and W. L. C. Rutten, "A technique for electrically inserting electrode arrays into peripheral nerves," in Proc. 16th Annu. Int. Conf. IEEE EMBS, 1994, [CD-ROM], Paper 452.
17. K. Donath and G. Breuner, "A method for the study undecalcified bones and teeth with attached soft tissues," J. Oral Pathol., vol. 11, pp. 318-324, 1982.
18. C. E. Edwards, P. A. Finger, D. J. Anderson, J. A. Wiler, J. F. Hetke, and R. A. Altschuler, "A technique for in vivo morphological evaluation of chronically implanted neuronal silicon substrate electrodes for confocal microscopy," in Abstracts for Microscopy and Microanalysis '97, Cleveland, OH, 1997, p. 351.
19. Q. Bai, M. D. Gingerich, and K. D. Wise, "An active three-dimensional microelectrode array for intracortical recording," in Dig. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1998, pp. 15-18.