Au/p-diamond ohmic contacts deposited by RF sputtering

Applied Surface Science

Volumn 255, Issue 5 PART 2, 2008, Pages 2916-2919

  Zhen, C M ^a,b   Wang, X Q ^c   Wu, X C ^d   Liu, C X ^a,b   Hou, D L ^a,b  

^a HEBEI NORMAL UNIVERSITY   (China)

^b Hebei Advance Thin Films Laboratory   (China)

^c NORTHEASTERN UNIVERSITY AT QINHUANGDAO   (China)

^d YANTAI UNIVERSITY   (China)

Author keywords

Circular transmission line model; Diamond film; Ohmic contact; Structural investigation

Indexed keywords

DIAMOND FILMS; ELECTRIC CONTACTORS; ELECTRIC LINES; ELECTROMAGNETIC WAVE EMISSION; GOLD; MICROSTRIP LINES; OHMIC CONTACTS; RADIO WAVES; SPUTTERING; TRANSMISSION LINE THEORY; X RAY PHOTOELECTRON SPECTROSCOPY;

AQUA-REGIA SOLUTION; CIRCULAR TRANSMISSION LINE MODEL; I-V MEASUREMENTS; INTERMEDIATE LAYERS; RADIO FREQUENCY SPUTTERING; SCAN ELECTRON MICROSCOPY; SPECIFIC CONTACT RESISTIVITY; STRUCTURAL INVESTIGATION;

GOLD DEPOSITS;

EID: 56949088135     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.08.063     Document Type: Article

References (11)

1. Gildenblat G.Sh., Grot S.A., and Badzian A. Proc. IEEE 79 (1991) 598
2. Geis M.W. Proc. IEEE 79 (1991) 669
3. Venkatesan V., Malta D.M., Das K., and Belu A.M. J. Appl. Phys. 74 (1993) 1179
4. Moazed K.L., Zeidler J.R., and Taylor M.J. J. Appl. Phys. 68 (1990) 2246
5. Willis A.J., and Botha A.P. Thin Solid Films 146 (1987) 15
6. Marlow G.S., and Das M.B. Solid-State Electron. 25 (1982) 91
7. Tachibana T., Williams B.E., and Glass J.T. Phys. Rev. B 45 (1992) 11968
8. Zhen C.M., Wang Y.Y., He S.H., Guo Q.F., Yan Z.J., and Pu Y.J. Opt. Mater. 23 (2003) 117
9. Gildenblat G.Sh., Grot S.A., Hatfield C.W., Badzian A.R., and Badzian T. Proc. IEEE Electron Dev. Lett. 11 (1990) 371
10. Lee J.-L., Weber M., Kim J.K., Lee J.W., Park Y.J., Kim T., and Lynn K. Appl. Phys. Lett. 74 (1999) 2289
11. Gonon P., Deneuville A., Gheeraert E., and Fontaine F. Diam. Relat. Mater. 3 (1994) 654