High aspect ratio diamond microelectrode array for neuronal activity measurements

Diamond and Related Materials

Volumn 17, Issue 7-10, 2008, Pages 1399-1404

  Bonnauron, M ^a   Saada, S ^a   Rousseau, L ^b   Lissorgues, G ^b   Mer, C ^a   Bergonzo, P ^a  

^a CEA LIST   (France)

^b ESIEE PARIS   (France)

Author keywords

BEN; CVD diamond; Microelectrode arrays; Nucleation

Indexed keywords

CLADDING (COATING); DIAMONDS; ELECTRODES; ELECTRON BEAM LITHOGRAPHY; EPITAXIAL GROWTH; METALLIZING; METALS; MICROELECTRODES; NONMETALS; NUCLEATION; PHOTORESISTS; PRESSURE DROP; REACTIVE ION ETCHING; SIGNAL PROCESSING; SILICON; SURFACE DEFECTS;

BEN; BIAS-ENHANCED NUCLEATION; BIO-SENSING; CHEMICAL NATURE; CVD DIAMOND; DEEP REACTIVE ION ETCHING; ELECTRICAL INSULATION; ELECTROCHEMICAL STABILITIES; ELECTRODE SURFACES; HIGH ASPECT RATIO; METAL CONTACTS; MICROELECTRODE ARRAYS; NEURAL ACTIVITIES; NEURONAL ACTIVITIES; NUCLEATION PROCESSES; OPTICAL TRANSPARENCY; PROCESSING ROUTES; SELECTIVE NUCLEATION; SIGNAL NOISE RATE;

ASPECT RATIO;

EID: 49049097901     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.12.065     Document Type: Article

References (25)

1. Baron M., Vitek J., Bakay R., et al. Ann. Neurol. 40 (1996) 355
2. Hochberg L.R., Serruya M.D., Mukand J.A., Polykoff G.M., Friehs G.M., and Donoghue J.P. (2005), Society for Neuroscience, Washington
3. Dobelle W.H. American Society of Artificial Internal Organs (ASAIO) No. 46 (January 2000) 3
4. Rodger D.C., Fong A.J., Li W., Ameri H., Lavrov I., Zhong H., Saati S., Menon P., Meng E., Burdick J.W., Roy R.R., Edgerton V.R., Weiland J.D., Humayun M.S., and Tai Y.C. Solid-State Sensors, Actuators and Microsystems Conference, 2007 TRANSDUCERS 2007. International Volume, Issue (10-14 June 2007) 1385
5. L. Rousseau, V. Perrais, G. Charvet, R. Guillemaud, G. Lissorgues, P. Meyrand, B.Yvert. MicrotTAS2007 Paris 7-11 OCT.
6. Yvert B., Branchereau P., and Meyrand P. J. Neurophysiol. 91 (2004)
7. Centre des Neurosciences Intégratives et Cognitives (2007). http://www.cnic.u-bordeaux1.fr http://www.cnic.u-bordeaux1.fr
8. Mendes de Barros R.C., Ferreira N.G., Azevedo A.F., Corat E.J., Sumodjo P.T.A., and Serrano S.H.P. Thin Solid Films 513 (2006) 364
9. Xie S., Shafer G., Wilson C.G., and Martin H.B. DRM 15 (2006) 225
10. Holt K.B., Hu J., and Foord J.S. Anal. Chem. 79 (2007) 2556
11. Kölling S., Hantschel T., and Vandervorst W. Microelectron. Eng. 84 (2007) 1178
12. Subramanian K., Kang W.P., Davidson J.L., Takalkar R.S., Choi B.K., Howell M., and Kerns D.V. Diam. Relat. Mater. 15 (2006) 1126
13. Provent C., Haenni W., Santoli E., and Rychen P. Electrochim. Acta 49 (2004) 3737
14. Soh K.L., Kang W.P., Davidson J.L., Basu S., Wong Y.M., Cliffel D.E., Bonds A.B., and Swain G.M. Diam. Relat. Mater. 13 (2004) 2009
15. Pagels M., Hall C.E., Lawrence N.S., Meredith A., Jones T.G.J., Godfried H.P., Pickles C.S.J., Wilman J., Banks C.E., Compton R.G., and Jiang L. Anal. Chem. 77 (2005) 3705
16. Lawrence N.S., Pagels M., Meredith A., Jones T.G.J., Hall C.E., Pickles C.S.J., Godfried H.P., Banks C.E., Comptonc R.G., and Jiang L. Talanta 69 (2006) 829
17. Yamada T., Yoshikawa H., Uetsuka H., Kumaragurubaran S., Tokuda N., and Shikata S.-i. Diamond Relat. Mater. 16 (2007) 996
18. Subramanian K., Kang W.P., Davidson J.L., Hofmeister W.H., Choi B.K., and Howell M. Diam. Relat. Mater. 14 (2005) 2099
19. Takalkar R.S., DavidsonT J.L., Kang W.P., and Wisitsora-at A. Diamond Relat. Mater. 14 (2005) 692
20. Saada S., Arnault J.C., Rocha L., and Bergonzo P. Mater. Res. Soc. Symp. Proc. vol. 956 (2007), MRS publications, Warrendale, PA
21. Wang X.D., Hong G.D., Zhang J., Lin B.L., Gong H.Q., and Wang W.Y. J. Mater. Process. Technol. 127 (2002) 230
22. Sakamoto Y., Takaya M., Sugimura H., Takai O., and Nakagiri N. Diam. Relat. Mater. 8 (1999) 1423
23. Marty F., et al. EMN (2004)
24. Williams O.A., Daenen M., D'Haen J., Haenen K., Maes J., Moshchalkov V.V., Nesládek M., and Gruen D.M. Diamond Relat. Mater. 15 4-8 (2006) 654
25. Nesládek M., Tromson D., Mer C., Bergonzo P., Hubik P., and Mares J.J. Appl. Phys. Lett. 88 (2006) 232111