Ion-erosion induced surface nanoporosity and nanotopography on Si

Journal of Chemical Physics

Volumn 134, Issue 24, 2011, Pages

  Sule P ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE OF INCIDENCE; ATOMISTIC SIMULATIONS; COOLING RATES; IMPACT ENERGY; INDIVIDUAL ION; ION SPUTTERING; LENGTH SCALE; LOW ENERGIES; NANO PATTERN; NANOHOLES; NANOPATTERNING; NANOPOROSITY; NANOTOPOGRAPHIES; SCANNING PROBES; SCANNING TUNNELING MICROSCOPY (STM); SELF-ORGANIZATIONS; SI SURFACES; SIMULATION TIME; SIZE RANGES; SPEED-UPS; STM IMAGES; SURFACE NANOTOPOGRAPHY; SYSTEM TEMPERATURE;

COMPUTER SIMULATION; IONS; MOLECULAR DYNAMICS; NANOTECHNOLOGY; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SILICON; SURFACE ROUGHNESS;

ION BOMBARDMENT;

EID: 79960183136     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3602918     Document Type: Article

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