RF magnetron sputtering SnO2: Sb films deposited on organic substrates

Solid State Communications

Volumn 121, Issue 6-7, 2002, Pages 345-349

  Ma, Jin ^a   Hao, Xiaotao ^a   Ma, Honglei ^a   Xu, Xiangang ^a   Yang, Yingge ^a   Huang, Shulai ^a   Zhang, Deheng ^a   Cheng, Chuanfu ^b  

^a SHANDONG UNIVERSITY   (China)

^b SHANDONG NORMAL UNIVERSITY   (China)

Author keywords

A. Organic substrate; A. Transparent conducting films; B. RF magnetron sputtering

Indexed keywords

CONDUCTIVE FILMS; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; POLYIMIDES; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

ORGANIC SUBSTRATES;

TIN COMPOUNDS;

EID: 0037154692     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(02)00009-1     Document Type: Article

References (12)