Large scale fluorine doped textured transparent conducting SnO2 films deposited by atmospheric pressure chemical vapour deposition

Thin Solid Films

Volumn 298, Issue 1-2, 1997, Pages 151-155

  Ma, H L ^a   Zhang, D H ^a   Chen, Y P ^a   Li, S Y ^a   Ma, J ^a   Zong, F J ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Chemical vapour deposition; Electrical properties; Optical properties; Tin oxide

Indexed keywords

ATMOSPHERIC PRESSURE; CARRIER CONCENTRATION; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY OF SOLIDS; FLUORINE; INFRARED SPECTROSCOPY; POLYCRYSTALLINE MATERIALS; TEXTURES; TIN COMPOUNDS; TRANSPARENCY;

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION; TIN OXIDE;

CONDUCTIVE FILMS;

EID: 0031124837     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09155-9     Document Type: Article

References (23)

1. J.L. Vossen, Phys. Thin Films, 9 (1977) 1.
2. K.L. Chopra, S. Major andD.K. Pandya, Thin Solid Films, 102 (1983) 1.
3. H. Haitjema and J. Elich, Solar Energy Mater., 16 (1987) 79.
4. J. Simonis, A.J. Faber and C.J. Hoogendoorn, J. Solar Energy Eng., 709 (1987) 22.
5. E. Shanthi, A. Banerjee, V. Dutta and K.L. Chopra, J. Appl. Phys., 53 (1982) 1615.
6. D. Pier and Kim Mitchell, Proc. 9th European Photovoltaic Solar Energy Conf. 9, Kluwer, Dordrecht, 1989, p. 488.
7. H. Iida, N. Shiba, T. Mishuku, H. Karasawa, A. Ito, M. Yamanaka and Y. Hayashi, IEEE Electron Devices Lett., EDL-4 (1983) 157.
8. R.G. Gorden and J. Proscia, Solar Energy Mater., 18 (1989) 263.
9. Jim Vetrone and Yip-Wah Chung, J. Vac. Sci. Technol., A9 (6) (1991) 3014.
10. H. De Waal and F. Simonis, Thin Solid Films, 77 (1981) 253.
11. E. Shanthi, A. Banerjee and K.L. Chopra, Thin Solid Films, 88 (1982) 93.
12. A.K. Saxena, R. Thangaraj, S.P. Singh and O.P. Agnihotri, This Solid Films, 131 (1985) 121.
13. H. Haitjema, J.J. Ph. Elich and C.J. Hoogendoorn, Solar Energy Mater., 18 (1989) 283.
14. J. Bruneaux, H. Cachet, M. Froment and A. Messad, Thin Solid Films, 797 (1991) 129.
15. G. Sanon, R. Rup and A. Mansingh, Thin Solid Films, 190 (1990) 287.
16. M. Miki-Yoshida and E. Andrade, Thin Solid Films, 224 (1993) 87.
17. H. Viirola and L. Niinisto, Thin Solid Films, 251 (1994) 127.
18. D.H. Zhang and D.E. Brodie, Thin Solid Films, 251 (1994) 151.
19. V. Vasu and A. Subrahmanyam, Thin Solid Films, 189 (1990) 217.
20. M. Tantini and I. Torriani, Thin Solid Films, 138 (1986) 255.
21. E. Shanthi, V. Dutta, A. Banerjee and K.L. Chopra, J. Appl. Phys., 51(12) (1980) 6243.
22. H. de Waal and F. Simonis, Thin Solid Films, 77 (1981) 253.
23. V.K. Jain and A.P. Kulshreshtha, Solar Energy Mater., 4 (1981) 151.