Electrical and plasma parameters of ICP with high coupling efficiency

Plasma Sources Science and Technology

Volumn 20, Issue 2, 2011, Pages

  Godyak, V A ^a  

^a RF Plasma Consulting   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA COILS; ARGON GAS PRESSURE; COUPLING EFFICIENCY; DISCHARGE POWER; FERROMAGNETIC CORES; NOVEL DESIGN; PLASMA CHARACTERISTICS; PLASMA PARAMETER;

ARGON;

ELECTRIC DISCHARGES;

EID: 79953685603     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/2/025004     Document Type: Article

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