Diode calibration of a Langmuir probe system for measurement of electron energy distribution functions in a plasma

Review of Scientific Instruments

Volumn 76, Issue 8, 2005, Pages 1-3

  DeJoseph Jr , C A ^a   Demidov, V I ^b  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b UES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); ENERGY RESOLUTION; LANGMUIR PROBE SYSTEM;

CALIBRATION; ELECTRIC POTENTIAL; ELECTRONS; MATHEMATICAL MODELS; RESISTORS; SIGNAL TO NOISE RATIO;

SEMICONDUCTOR DIODES;

EID: 26444617184     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2006287     Document Type: Article

References (9)

1. F. F. Chen, in Plasma Diagnostic Techniques, edited by R. M. Huddiestone and S. L. Leonard (Academic, New York, 1965), p. 113.
2. V. A. Godyak, in Plasma-Surface, Interaction and Processing of Materials (Kluwer, Deventer, 1990), p. 95.
3. V. I. Demidov, S. V. Ratynskaia, and K. Rypdal, Rev. Sci. Instrum. 73, 3409 (2002).
4. M. J. Druyvesteyn. Z. Phys. 64, 781 (1930).
5. H. Amemiya, Jpn. J. Appl. Phys. 15, 1767 (1976).
6. K. F. Schoenberg, Rev. Sci. Instrum. 51, 1159 (1980).
7. V. I. Demidov and N. B. Kolokolov, Sov. Phys. Tech. Phys. 26, 533 (1981).
8. A. B. Blagoev, V. I. Demidov, N. B. Kolokolov, and O. G. Toronov, Sov. Phys. Tech. Phys. 26, 1179 (1981).
9. W. Guo, and C. A. DeJoseph, Jr., Plasma Sources Sci. Technol. 10, 43 (2001).