Radio frequency potential of inductive plasma immersed in a weak magnetic field

Applied Physics Letters

Volumn 84, Issue 9, 2004, Pages 1468-1470

  Godyak, V A ^a   Alexandrovich, B M ^a  

^a OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); RADIO FREQUENCY POTENTIAL;

ARGON; CYCLOTRON RESONANCE; ELECTRODYNAMICS; FUNCTIONS; HALL EFFECT; MAGNETIC FIELDS; MATHEMATICAL MODELS; PRESSURE EFFECTS; QUARTZ; STAINLESS STEEL; TURBULENCE;

INDUCTIVELY COUPLED PLASMA;

EID: 1642604069     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1655698     Document Type: Article

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