RF harmonic suppression in Langmuir probe measurements in RF discharges

Plasma Sources Science and Technology

Volumn 5, Issue 1, 1996, Pages 61-69

  Flender, U ^a   Nguyen Thi, B H ^a,c   Wiesemann, K ^a   Khromov, N A ^b   Kolokolov, N B ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^c HANOI UNIVERSITY   (Viet Nam)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC SPACE CHARGE; FEEDBACK; OPERATIONAL AMPLIFIERS; PLASMA SHEATHS; RESISTORS;

LANGMUIR PROBES;

PLASMA DEVICES;

EID: 0030073718     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/1/008     Document Type: Article

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