Hot Langmuir probe measurements in a chemically reactive plasma and accurate evaluation of the electron energy distribution function

Vacuum

Volumn 51, Issue 2, 1998, Pages 89-97

  Popov, Ts ^a   Petkov, I ^b  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b INSTITUTE OF ELECTRONICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRON ENERGY LEVELS; FLUOROCARBONS;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF); HOT LANGMUIR PROBE MEASUREMENTS;

PLASMAS;

EID: 0032183659     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00139-0     Document Type: Article

References (29)

1. Plumb, I. C. and Ryan, K. R., Plas. Chem. Plas. Proc., 1986, 6(3), 205.
2. Hershkowitz, N. and Maynard, H. L., J. Vac. Sci. Technol. A, 1993, 11, 1174.
3. Buchmann, L. M., Heinrich, F., Hoffmann, P. and Janes, J., J. Appl. Phys., 1990, 67, 3635.
4. Ashtiani, K. A., Shohet, J. L. and Harvey, R. E. P., J. Vac. Sci. Technol. A, 1993, 11, 1136.
5. Ivanov, Yu. A., Lebedev, Yu. A. and Polak, L. S., Methods of Contact Diagnostics of Nonequilibrium Plasma Chemistry. Moscow, Nauka, 1981, (in Russian).
6. Haverlag, M., Kroesen, G. M. W. and de Hoog, F. J., 10th ISPC, Bochum, Germany, 1991, 2.1-31.
7. Cherrington, B. E., Plas. Chem. Plas Proc., 1982, 2(2), 113.
8. Amemiya, H., J. Phys. D: Appl. Phys., 1990, 23, 999.
9. Popov, Tc., Pirgov, P. and Bossev, D., Vacuum Electron and Ion Technologies, ed. D. Karpuzov, New York, Nova Sci, Publ. Inc, 1996, 29.
10. Chen, F., Electric Probes in Plasma Diagnostic Techniques, ed. R. H. Huddlestone and S. L. Leonard, Academic Press, NY, 1965.
11. Druyvesteyn, M. J., Z. Phys, 1930, 64, 781.
12. Branner, G. R., Friar, E. M. and Medicus, G., RSI, 1963, 34, 231.
13. Blagoev, A. B. et al, Sov. Phys. Tech. Phys., 1975, 45, 579.
14. Blagoev, A. B. et al, Sov. Phys. Tech. Phys., 1981, 51, 2022.
15. Chang, J.-S., J. Phys. D: Appl. Phys., 1973, 6, 1674.
16. Yasuda, H., Plasma Polymerisation, Academic Press Inc., 1985.
17. D'Arcy, R. J., J. Phys. D: Appl. Phys., 1974, 7, 1391.
18. Herrmann, D. and Klagge, S., Beitr. Plasmaphys., 1972, 12, 45.
19. Pfau, S. et al, 10th ISPC, Bochum, Germany, 1991, 2.1-58.
20. Demidov, V. I., Kolokolov, N. B. and Kudriavtsev, A. A., Probe Methods of Diagnostics of Low Temperature Plasma, Moscow, Energoatomizdat, 1996, (in Russian).
21. Chang, K. W. and Bienkowski, G. K., Phys. Fluids, 1970, 13(4), 902.
22. Schuss, J. J. and Parker, R. R., J. Appl. Phys., 1974, 45(1), 4778.
23. Smith, J. R., Hershkowitz, N. and Coakley, P., Rev. Sci. Instrum., 1979, 50, 210.
24. Popov, Ts., 9th Intern. School on Vacuum, Electron and Ion Technologies, 14-18 Sept. Sozopol, Bulgaria, 1995, B5, 69.
25. Langmuir, I. and Compton, K. T., Rev. Mod. Phis., 1931, 3, 191.
26. Kemp, R. F. and Sellen Jr, J. M., RSI, 1966, 37, 455.
27. Boyd, R. L. F. and Thompson, J. B., Proc. R. Soc., London, Ser, 1959, A252, 102.
28. Amemiya, H., Jpn. J. Appl. Phys., 1986, 25, 595.
29. Petkov, I. and Pirgov, P., 9th Intern. School on Vacuum, Electron and Ion Technologies, 14-18 Sept. Sozopol, Bulgaria, 1995, PB4, 72.