Effects of pulsed bias duty ratio on microstructure and mechanical properties of TiN/TiAlN multilayer coatings

Applied Surface Science

Volumn 257, Issue 17, 2011, Pages 7881-7886

  Wei, Yongqiang ^a   Gong, Chunzhi ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Arc ion plating; Duty ratio; Multilayer coatings; Surface hardness; TiN TiAlN

Indexed keywords

COATINGS; HARDNESS; ION IMPLANTATION; MICROSTRUCTURE; MULTILAYERS; SURFACE ROUGHNESS; TOOL STEEL; WEAR OF MATERIALS;

ARC ION PLATING; DUTY RATIOS; MICROSTRUCTURE AND MECHANICAL PROPERTIES; MULTI-LAYER-COATING; PULSED BIAS ARC ION PLATINGS; SURFACE HARDNESS; TIN/TIALN MULTILAYER COATINGS; TRIBOLOGICAL PROPERTIES;

TITANIUM NITRIDE;

EID: 79957492615     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.04.066     Document Type: Article

References (33)

1. O. Knotek, M. Bohmer, and T. Leyendecker On structure and properties of sputtered Ti and Al based hard compound films J. Vac. Sci. Technol. A 4 1986 2695 2700
2. X. Li, C. Li, Y. Zhang, H. Tang, G. Li, and C. Mo Tribological properties of the Ti-Al-N thin films with different components fabricated by double-targeted co-sputtering Appl. Surf. Sci. 256 2010 4272 4279
3. S. Paldey, and S.C. Deevi Single layer and multilayer wear resistant coatings of (Ti, Al)N: a review Mater. Sci. Eng. A 342 2003 58 79 (Pubitemid 35442379)
4. P.J. Mcguiness, M. Cekada, V. Nemanic, B. Zajec, and A. Recnik Hydrogen permeation through TiAlN-coated Eurofer '97 steel Surf. Coat. Technol. 205 2011 2709 2713
5. R.D. Torres, P.C. Soares Jr., C. Schmitz, and C.J.M. Siqueira Influence of the nitriding and TiAlN/TiN coating thickness on the sliding wear behavior of duplex treated AISI H13 steel Surf. Coat. Technol. 205 2010 1381 1385
6. p substrate by Arc ion plating Surf. Coat. Technol. 202 2008 5170 5174
7. C.H. Hsu, M.L. Chen, and K.L. Lai Corrosion resistance of TiN/TiAlN-coated ADI by cathodic arc deposition Mater. Sci. Eng. A 421 2006 182 190
8. C.H. Hsu, J.K. Lu, K.L. Lai, and M.L. Chen Erosion and corrosion behaviors of ADI deposited TiN/TiAlN coatings by cathodic arc evaporation Mater. Trans. 46 2005 1417 1424
9. M. Braic, M. Balaceanu, V. Braic, A. Vladescu, G. Pavelescu, and M. Albulescu Synthesis and characterization of TiN, TiAIN and TiN/TiAIN biocompatible coatings Surf. Coat. Technol. 200 2005 1014 1017 (Pubitemid 41282334)
10. E. Zoestbergen, N.J.M. Carvalho, and J.T.M. De Hosson Stress state of TiN/TiAlN PVD multilayers Surf. Eng. 17 2001 29 34 (Pubitemid 32272332)
11. C.V. Falub, A. Karimi, M. Ante, and W. Kalss Interdependence between stress and texture in arc evaporated Ti-Al-N thin films Surf. Coat. Technol. 201 2007 5891 5898 (Pubitemid 46173137)
12. E. Bagci, and B. Ozcelik Investigation of the effect of drilling conditions on the twist drill temperature during step-by-step and continuous dry drilling Mater. Design 27 2006 446 454 (Pubitemid 43033348)
13. W. Olbrich, J. Fessmann, G. Kampschulte, and J. Ebberink Improved control of TiN coating properties using cathodic arc evaporation with a pulsed bias Surf. Coat. Technol. 49 1991 258 262
14. R.F. Huang, C.Y. Chan, C.H. Lee, J. Gong, K.H. Lai, C.S. Lee, K.Y. Li, L.S. Wen, and C. Sun Wear-resistant multilayered diamond-like carbon coating prepared by pulse biased arc ion plating Diam. Relat. Mater. 10 2001 1850 1854 (Pubitemid 32849652)
15. X.S. Wan, S.S. Zhao, Y. Yang, J. Gong, and C. Sun Effects of nitrogen pressure and pulse bias voltage on the properties of Cr-N coatings deposited by arc ion plating Surf. Coat. Technol. 204 2010 1800 1810
16. M. Zhang, G.Q. Lin, G.Y. Lu, C. Dong, and K.H. Kim Higherature oxidation resistant (Cr, Al)N films synthesized using pulsed bias arc ion plating Appl. Surf. Sci. 254 2008 7149 7154
17. S. Li, J. Song, C. Zhou, S. Gong, and Y. Han Microstructure evolution of NiCoCrAlY overlay coating for Ni3Al based alloy IC6 turbine vane during long term engine test Intermetallics 13 2005 309 314 (Pubitemid 40242510)
18. C. Liu, P.K. Chu, G. Lin, and D. Yang Effects of Ti/TiN multilayer on corrosion resistance of nickel-titanium orthodontic brackets in artificial saliva Corros. Sci. 49 2007 3783 3796 (Pubitemid 47379666)
19. Y. Zhao, G. Lin, J. Xiao, H. Du, C. Dong, and L. Gao Ti/TiN multilayer thin films deposited by pulse biased arc ion plating Appl. Surf. Sci. 257 2011 2683 2688
20. Y. Zhao, G. Lin, J. Xiao, C. Dong, and L. Wen TiN/TiC multilayer films deposited by pulse biased arc ion plating Vacuum 85 2010 1 4
21. H.A. Castillo, E. Restrepo-Parra, and P.J. Arango-Arango Chemical and morphological difference between TiN/DLC and a-C:H/DLC grown by pulsed vacuum arc techniques Appl. Surf. Sci. 257 2011 2665 2668
22. Y.Y. Wang, M.S. Wong, W.J. Chia, J. Rechner, and W.D. Sproul Synthesis and characterization of highly textured polycrystalline AlN/TiN superlattice coatings J. Vac. Sci. Technol. A 16 1998 3341 3347
23. E. Lugscheider, O. Knotek, F. Löffler, C. Barimani, S. Guerreiro, and H. Zimmermann Deposition of arc TiAlN coatings with pulsed bias Surf. Coat. Technol. 76-77 1995 700 705
24. R.L. Boxman, and S. Goldsmith Macroparticle contamination in cathodic arc coatings: generation, transport and control Surf. Coat. Technol. 52 1992 39 50
25. Y.Q. Wei, C.Z. Gong, X.B. Tian, and S.Q. Yang Uniformity of thickness and surface properties of TiN films deposited by vacuum arc Rare Met. Mater. Eng. 38 2009 788 793
26. D.M. Mattox Particle bombardment effects on thin-film deposition: a review J. Vac. Sci. Technol. A 7 1989 1105 1114
27. S. Paldey, S.C. Deevi, and T.L. Alford Cathodic arc deposited thin film coatings based on TiAl intermetallics Intermetallics 12 2004 985 991
28. A. Knutsson, M.P. Johansson, L. Karlsson, and M. Oden Thermally enhanced mechanical properties of arc evaporated Ti0.34Al0.66N/TiN multilayer coatings J. Appl. Phys. 108 2010 044312 44317
29. C. Mendibide, P. Steyer, J. Fontaine, and P. Goudeau Improvement of the tribological behaviour of PVD nanostratified TiN/CrN coatings - an explanation Surf. Coat. Technol. 201 2006 4119 4124 (Pubitemid 44793741)
30. L.S. Wen, and R.F. Huang Some fundamental problems of pulse biased arc ion plating Surf. Coat. Technol. 193 2005 1 5 (Pubitemid 40251946)
31. G. Lin, X. Bai, C. Dong, and L. Wen Substrate temperature calculation for pulsed bias arc ion plating Surf. Coat. Technol. 194 2005 325 329
32. A. Vladescu, A. Kiss, A. Popescu, M. Braic, M. Balaceanu, V. Braic, I. Tudor, C. Logofatu, C.C. Negrila, and R. Rapeanu Influence of bilayer period on the characteristics of nanometre-scale ZrN/TiAlN multilayers J. Nanosci. Nanotechnol. 8 2008 717 721 (Pubitemid 351584663)
33. C.M. Kao, J.W. Lee, H.W. Chen, Y.C. Chan, J.G. Duh, and S.P. Chen Microstructures and mechanical properties evaluation of TiAlN/CrSiN multilayered thin films with different bilayer periods Surf. Coat. Technol. 205 2010 1438 1443