Synthesis and characterization of highly textured polycrystalline AlN/TiN superlattice coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3341-3347

  Wang, Y Y ^a,b   Wong, M S ^a,c   Chia, W J ^a,d   Rechner, J ^a,e   Sproul, W D ^a,e  

^a NORTHWESTERN UNIVERSITY   (United States)

^b IBM   (United States)

^c NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^d WESTERN DIGITAL CORPORATION   (United States)

^e Sputtered Films Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032357941     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581542     Document Type: Article

References (14)

1. W. D. Sproul, Science 273, 889 (1996).
2. M. Shinn, L. Hultman, and S. A. Barnett, J. Mater. Res. 7, 901 (1992).
3. U. Helmersson, S. Todorova, S. A. Barnett, J. E. Sundgren, L. C. Markert, and J. E. Greene, J. Appl. Phys. 62, 481 (1987).
4. P. Yashar, X. Chu, M. S. Wong, W. D. Sproul, and S. A. Barnett (unpublished).
5. X. Chu and S. A. Barnett, J. Appl. Phys. 77, 4403 (1995).
6. X. Chu, M. S. Wong, W. D. Sproul, S. L. Rohde, and S. A. Barnett, J. Vac. Sci. Technol. A 10, 1604 (1992).
7. X. Chu, S. A. Barnett, M. S. Wong, and W. D. Sproul, Surf. Coat. Technol. 57, 13 (1993).
8. J. C. Schuster and J. Bauer, J. Solid State Chem. 53, 260 (1984).
9. W. J. Chia, Y. Y. Wang, M. S. Wong, L. Xie, J. Rechner, W. D. Sproul, and S. A. Barnett, J. Vac. Sci. Technol. A (submitted).
10. A. Madan, I. W. Kim, S. C. Cheng, P. Yashar, V. P. Dravid, and S. A. Barnett, Phys. Rev. Lett. 78, 1743 (1996).
11. M. Setoyama, A. Nakayama, M. Tanaka, N. Kitagawa, and T. Nomura, Surf. Coat. Technol. 86-87, 225 (1996).
12. M. Setoyama, A. Nakayama, T. Yoshioka, T. Normuar, A. Shibata, M. Chudou, and H. Arimoto, Sumitomo Electric Industries 146, 91 (1995).
13. W. D. Sproul, Surf. Coat. Technol. 33, 73 (1987).
14. X. Chu, Ph.D. thesis, Northwestern University, 1995.