High-temperature oxidation resistant (Cr, Al)N films synthesized using pulsed bias arc ion plating

Applied Surface Science

Volumn 254, Issue 22, 2008, Pages 7149-7154

  Zhang, Min ^a   Lin, Guoqiang ^b   Lu, Guoying ^c   Dong, Chuang ^b   Kim, Kwang Ho ^d  

^a DALIAN POLYTECHNIC UNIVERSITY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^c Nissin Advanced Coatings (Dalian) Technology Co Ltd   (China)

^d Pusan National University   (South Korea)

Author keywords

(Cr, Al)N films; Arc ion plating; High temperature oxidation resistance; Pulsed bias

Indexed keywords

ALUMINUM; DEPOSITION RATES; IONS; METALLIC FILMS; OXIDATION RESISTANCE; PHASE STRUCTURE; SUBSTRATES; THERMOOXIDATION;

316 L STAINLESS STEEL; ARC ION PLATING; FILM COMPOSITION; HIGH TEMPERATURE; PSEUDO-BINARIES; PULSED BIAS; PULSED BIAS ARC ION PLATINGS; SUBSTRATE BIAS;

ION IMPLANTATION;

EID: 50549097107     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.293     Document Type: Article

References (20)

1. Erturk E., and Haessler H. Thin Solid Films 153 (1987) 433
2. Munz W.D. J. Vac. Sci. Technol. A 4 (1986) 2717
3. Ikeda T., and Satoh H. Thin Solid films 195 (1991) 99
4. Baker M.A., Kench P.J., Joseph M.C., Tsotsos C., Leyland A., and Matthews A. Surf. Coat. Technol. 162 (2003) 222
5. Ichimura H., and Kawana A. J. Mater. Res. 9 (1994) 151
6. Knotek O., Loeffler F., and Scholl H. Surf. Coat. Technol. 45 (1991) 53
7. Lugscheider E., Bobzin K., Hornig Th., and Mases M. Thin Solid Films 420-421 (2002) 318
8. Barshilia H.C., Deepthi B., Selvakumar N., Jain A., and Rajam K.S. Appl. Surf. Sci. 253 (2007) 5076
9. Anders A. Thin Solid Films 502 (2006) 22
10. Lin G., Zhao Y., Guo H., Wang D., Dong C., and Wen L. J. Vac. Sci. Technol. A22 (2004) 1218
11. Lin G., Bai X., Dong C., and Wen L. Surf. Coat. Technol. 194 (2005) 325
12. Huang M.D., Lee Y.P., Dong C., Lin G.Q., Sun C., and Wen L.S. J. Vac. Sci. Technol. A 22 (2004) 250
13. Zhang M., Lin G., Dong C., and Wen L. Surf. Coat. Technol. 201 (2007) 7252
14. Davis W.D., and Miller H.C. J. Appl. Phys. 50 (1968) 2212
15. Coll B.F., Fontana R., Gates A., and Sathrum P. Mater. Sci. Eng. A 140 (1991) 816
16. Wang D., Li Y., Chang C., and Ho W. Surf. Coat. Technol. 114 (1999) 109-113
17. Zhang M., Lin G., Dong C., and Wen L. Acta Metall. Sina. 43 (2007) 509
18. Bardos L., Barankova H., and Gustavsson L.-E. J. Vac. Sci. Technol. A 24 (2006) 1655
19. Rebenne H.E., and Bhat D.G. Surf. Coat. Technol. 63 (1994) 1
20. Ide Y., Inada K., and Nakamura T. High Temp. Mater. Processes 19 (2000) 265