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Applied Surface Science

Volumn 257, Issue 7, 2011, Pages 2683-2688

Ti/TiN multilayer thin films deposited by pulse biased arc ion plating

(6) Zhao, Yanhui a Lin, Guoqiang b Xiao, Jinquan a Du, Hao a Dong, Chuang b Gao, Lijun a

a INSTITUTE OF METAL RESEARCH (China)

b DALIAN UNIVERSITY OF TECHNOLOGY (China)

Author keywords

Adhesion; Hardness; Multilayer films; Pulse biased arc ion plating

Indexed keywords

ADHESION; FILM PREPARATION; HARDNESS; ION IMPLANTATION; IONS; MODULATION; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; TITANIUM ALLOYS; TOOL STEEL; X RAY CRYSTALLOGRAPHY; X RAY DIFFRACTION ANALYSIS;

CROSS-SECTIONAL MORPHOLOGY; HARDNESS ENHANCEMENT; HIGH SPEED STEEL SUBSTRATE; MODULATION PERIOD; NANO-INDENTATION MEASUREMENTS; PULSE BIASED ARC ION PLATINGS; TI/TIN MULTILAYERS; X-RAY DIFFRACTION ANALYSES (XRD);

MULTILAYER FILMS;

EID: 79251593377 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2010.10.042 Document Type: Article

Times cited : (30)

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