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Volumn 17, Issue 1, 2001, Pages 29-34

Stress state of TiN/TiAlN PVD multilayers

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION; POISSON RATIO; RESIDUAL STRESSES; STAINLESS STEEL; STRAIN MEASUREMENT; STRESS ANALYSIS; SUBSTRATES; TITANIUM NITRIDE; X RAY DIFFRACTION;

EID: 0035063976     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/026708401101517566     Document Type: Article
Times cited : (19)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.