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Volumn 17, Issue 1, 2001, Pages 29-34
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Stress state of TiN/TiAlN PVD multilayers
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL LATTICES;
CRYSTAL MICROSTRUCTURE;
PHYSICAL VAPOR DEPOSITION;
POISSON RATIO;
RESIDUAL STRESSES;
STAINLESS STEEL;
STRAIN MEASUREMENT;
STRESS ANALYSIS;
SUBSTRATES;
TITANIUM NITRIDE;
X RAY DIFFRACTION;
ATOMIC PEENING;
MACROSTRESSES;
MULTILAYERS;
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EID: 0035063976
PISSN: 02670844
EISSN: None
Source Type: Journal
DOI: 10.1179/026708401101517566 Document Type: Article |
Times cited : (19)
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References (16)
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