Microstructures and mechanical properties evaluation of TiAlN/CrSiN multilayered thin films with different bilayer periods

Surface and Coatings Technology

Volumn 205, Issue 5, 2010, Pages 1438-1443

  Kao, Chien Ming ^a   Lee, Jyh Wei ^b   Chen, Hsien Wei ^c   Chan, Yu Chen ^c   Duh, Jenq Gong ^c   Chen, Shin Pei ^a  

^a TUNGNAN UNIVERSITY   (Taiwan)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Bilayer period; Fracture toughness; Pulsed DC reactive magnetron sputtering; TiAlN CrSiN multilayer coating

Indexed keywords

BILAYER PERIOD; CROSS-SECTIONAL MORPHOLOGY; DEFORMATION RESISTANCE; MICRO VICKERS HARDNESS; MICROSTRUCTURES AND MECHANICAL PROPERTIES; MULTI-LAYER-COATING; MULTILAYERED COATINGS; MULTILAYERED THIN FILMS; NANO SCALE; NANOINDENTERS; PIN-ON-DISK WEAR TEST; PULSED DC; SEM; TEM; TIALN/CRSIN MULTILAYER COATING; TRIBOLOGICAL BEHAVIORS; TRIBOLOGICAL PROPERTIES; X RAY DIFFRACTOMETERS;

ATOMIC FORCE MICROSCOPY; DC POWER TRANSMISSION; FILM PREPARATION; FRACTURE; INORGANIC COATINGS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; VAPOR DEPOSITION; VICKERS HARDNESS; VICKERS HARDNESS TESTING;

FRACTURE TOUGHNESS;

EID: 78649962011     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.07.107     Document Type: Article

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