Uniformity of thickness and surface properties of tin films deposited by vacuum arc

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

Volumn 38, Issue 5, 2009, Pages 788-793

  Wei, Yongqiang ^a   Gong, Chunzhi ^a   Tian, Xiubo ^a   Yang, Shiqin ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Cathodic vacuum arc deposition; Electrochemical corrosion; Friction wear; Hardness; TiN

Indexed keywords

CATHODIC VACUUM ARC DEPOSITION; ELECTROCHEMICAL METHODS; FRICTION COEFFICIENTS; FRICTION WEAR; FRICTIONAL BEHAVIOR; GAS FLOWS; LINE-OF-SIGHT; MACRO-PARTICLES; MACROPARTICLE; MINIMAL THICKNESS; NONUNIFORMITY; PIN-ON-DISK TRIBOMETER; PROPERTIES OF DEPOSITED FILMS; PUMPING SYSTEMS; SCRATCH TEST; SEM; TIN FILMS; VACUUM ARC DEPOSITION; VACUUM ARC PLASMA; VACUUM ARCS; XRD;

ADHESION; CAVITY RESONATORS; CORROSION RESISTANCE; ELECTROCHEMICAL CORROSION; FRICTION; HARDNESS; METALLIC FILMS; PLASMA DEPOSITION; STAINLESS STEEL; STEEL METALLURGY; SURFACE PROPERTIES; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE; TRACE ANALYSIS; TRIBOLOGY; VACUUM; VACUUM DEPOSITION; VACUUM TECHNOLOGY;

SURFACE MORPHOLOGY;

EID: 67649195803     PISSN: 1002185X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

1. Liu Tianwei, Xian Xiaobin, Wu Sheng et al. Rare Metal Materials and Engineering[J], 2006, 35(9): 1437.
2. Huang Yuanlin, Ma Shining, Li Changqing et al. Journal of Materials Engineering[J], 2004(5): 23.
3. Hsu C H, Chen M L, Lai K L. Mat Sci Eng A[J], 2006, 421(1-2): 182.
4. Shi Xinwei, Li Chunming, Qiu Wanqi et al. The Chinese Journal of Nonferrous Metals[J], 2006, 16(7): 1227.
5. Xu Xiangrong, Huang Nacan, Lu Guohui et al. Heat Treatment of Metals[J], 2005, 30(7): 40.
6. Chen Zhaoping, Zhu Chang, Guo Rui. Journal of Vacuum Science and Technology[J], 2006, 26(3): 228.
7. Daalder J E. J Phys D: Appl Phys[J], 1976, 9(16): 2379.
8. Tay B K, Z W Zhao, Chua D H C. Mat Sci Eng R[J], 2006, 52(1-3): 1.
9. Poirier D M, Lindfors P A. J Vac Sci Tech A[J], 1991, 9(2): 278.
10. Vershinin N, Straumal B, Gust W. J Vac Sci Tech A[J], 1996, 14(6): 3252.
11. Fuchs H, Mecke H, Ellrodt M. Surf Coat Tech[J], 1998, 98(1-3): 839.
12. Tuma DT, Chen C L, Davies D K. J Appl Phys[J], 1978, 49(7): 3821.
13. Mi Qian, Cai Changlong, Ma Weihong et al. Vacuum[J], 2006, 43(1): 43.
14. Fuchs H et al. Surf Coat Tech[J], 2001, 142-144: 655.
15. Chen Y M, Yu G P, Huang J H. Corrosion[J], 2002, 58(10): 846.
16. Chen Y M, Yu G P, Huang J H. Surf Coat Tech[J], 2002, 150(2-3): 309.
17. Arata Y, Ohmori A, Li C J. Thin Solid Films[J], 1988, 156: 315.
18. Chen B F, Pan W L, Yu G P et al. Surf Coat Tech[J], 1999, 111(1): 16.
19. Shi Xinwei, Li Xingrui, Qiu Wanqi et al. Journal of Vacuum Science and Technology[J], 2006, 26(4): 330.