GHz range nanoscaled AlN contour-mode resonant sensors (CMR-S) with self-sustained CMOS oscillator

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 471-474

  Rinaldi, M ^a   Zuniga, C ^a   Zuo, C ^a   Piazza, G ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM NITRIDE; CHEMICAL DETECTION; CMOS INTEGRATED CIRCUITS; III-V SEMICONDUCTORS; MICROSYSTEMS; ORGANIC CHEMICALS; VOLATILE ORGANIC COMPOUNDS;

CMOS OSCILLATORS; CONTOUR MODE; EXPERIMENTAL VERIFICATION; FAST RESPONSE TIME; HIGH FREQUENCY HF; LIMIT OF DETECTION; RESONANT SENSORS; VOLATILE ORGANIC CHEMICALS;

SOLID-STATE SENSORS;

EID: 85053947300     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.128     Document Type: Conference Paper

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