ZnO-on-nanocrystalline diamond lateral bulk acoustic resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 795-798

  Abdolvand, Reza ^a   Ho, Gavin K ^a   Butler, James ^b   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; DIAMONDS; ELECTROMECHANICAL COUPLING; II-VI SEMICONDUCTORS; MEMS; NANOCRYSTALS; NATURAL FREQUENCIES; PIEZOELECTRICITY; SILICON ON INSULATOR TECHNOLOGY; ZINC OXIDE;

BULK ACOUSTIC RESONATORS; DIAMOND COMPOSITES; HIGH RESONANCE FREQUENCY; NANO-CRYSTALLINE DIAMONDS; RESONANCE FREQUENCIES; SILICON-ON-INSULATOR SUBSTRATES; TEMPERATURE COEFFICIENT OF FREQUENCIES; THIN FILM PIEZOELECTRIC;

ELECTROMECHANICAL DEVICES;

EID: 39549117106     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433131     Document Type: Conference Paper

References (8)

1. T. Uemura, et al., "Low loss diamond SAW devices by small grain size poly-crystalline diamond," Proceedings Ultrasonics Symposium,vol. 1, 2002, pp. 431-434
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7. F. S. Hickernell, "ZnO Processing for Bulk- and Surface-Wave Devices," Ultrasonics Symposium, 1980, pp. 785-794
8. G. K. Ho, R. Abdolvand, F. Ayazi, "High order composite bulk acoustic resonators," to be presented in International Conference on Micro Electro Mechanical Systems (MEMS '07), 2007