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Volumn 109, Issue 7, 2011, Pages

Cavity formation in a liquid Sn droplet driven by laser ablation pressure for an extreme ultraviolet light source target

(6) Yuspeh, S a Ueno, Y a,b Tillack, M S a Burdt, R a Tao, Y a Najmabadi, F a

a UNIVERSITY OF CALIFORNIA (United States)

b KOMATSU LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; ABLATION PRESSURE; CAVITY FORMATION; EXTREME ULTRAVIOLET LIGHT SOURCES; IN-SITU; ION DENSITY; LASER ENERGIES; PRESSURE SOURCE; TWO-DIMENSIONAL HYDRODYNAMICS;

ABLATION; EXTREME ULTRAVIOLET LITHOGRAPHY; LIGHT SOURCES; LIQUIDS; TIN; ULTRAVIOLET LASERS; ULTRAVIOLET RADIATION;

PULSED LASERS;

EID: 79955447283 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3572038 Document Type: Conference Paper

Times cited : (2)

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