Characterization of Tin vapor from CO2 laser produced EUV light source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7361, Issue , 2009, Pages

  Ueno, Yoshifumi ^a   Yanagida, Tatsuya ^a   Suganuma, Takashi ^a   Komori, Hiroshi ^a   Sumitani, Akira ^a   Endo, Akira ^a  

^a Extreme Ultra Violet Lithography System Development Association   (Japan)

Author keywords

CO2 laser; Debris; Extreme ultraviolet lithography; Laser produced plasma; LIF; Sn

Indexed keywords

1064 NM; CO2 LASER; EUV LIGHT SOURCES; FARADAY CUPS; LASER INDUCED FLUORESCENCE; LIF; LIQUID DROPLETS; LOW ENERGIES; MICRO DROPLETS; ND: YAG; PLASMA IONS; SN; TARGET MATERIALS; TIN VAPOR;

DEBRIS; DROP FORMATION; ELECTRON ENERGY LOSS SPECTROSCOPY; EXTREME ULTRAVIOLET LITHOGRAPHY; IONS; KINETIC ENERGY; LASER PRODUCED PLASMAS; LASERS; LIGHT; LIQUIDS; NEODYMIUM LASERS; OPTICS; PULSED LASER APPLICATIONS; TARGETS; ULTRAVIOLET DEVICES;

TIN;

EID: 69949138080     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.820966     Document Type: Conference Paper

References (13)

1. Akira Endo, Hideo Hoshino, Takashi Suganuma, Masato Moriya, Tatsuya Ariga, Yoshifumi Ueno, Masaki Nakano, Takeshi Asayama, Tamotsu Abe, Hiroshi Komori, Georg Soumagne, Hakaru Mizoguchi, Akira Sumitani and Koichi Toyoda, Proc. of SPIE Vol.6517, 65170O, (2007).
2. Yoshifumi Ueno, Hideo Hoshino, Tatsuya Ariga, Taisuke Miura, Masaki Nakano, Hiroshi Komori, Georg Soumagne, Akira Endo, Hakaru Mizoguchi, Akira Sumitani and Koichi Toyoda, Proc. of SPIE Vol.6517, 65173B, (2007).
3. Yoshifumi Ueno, Georg Soumagne, Masato Moriya, Takashi Suganuma, Tamotsu Abe, Hiroshi Komori, Akira Endo, and Akira Sumitani, Proc. SPIE 6921, 69212Z (2008).
4. Yoshifumi Ueno, Georg Soumagne, Takashi Suganuma, Takayuki Yabu, Masato Moriya, Hiroshi Komori, Tamotsu Abe, Akira Endo, and Akira Sumitani, Proc. SPIE 7005, 70052U (2008).
5. Yoshifumi Ueno, Georg Soumagne, Akira Sumitani, Akira Endo, Takeshi Higashiguchi and Noboru Yugami, Appl. Phys. Lett. 92, 211503 (2008).
6. Masaki Nakano, Takayuki Yabu, Hiroshi Someya, Tamotsu Abe, Georg Soumagne, Akira Endo and Akira Sumitani, Proc. SPIE 6921, 69213O (2008).
7. D. Nakamura, T. Akiyama, K. Okazaki, K. Tamaru, A. Takahashi, and T. Okada, J. Phys. D: Appl. Phys. 41, 245210 (6pp), (2008).
8. T. Higashiguchi, M. Hamada and S. Kubodera, Rev. Sci.Instrum. 78 036106 (2007).
9. T. Higashiguchi, M. Kaku, M. Katto, and S. Kubodera, Appl. Phys. Lett. 91, 151503 (2007).
10. M. Murakami, Y.-G. Kang, K. Nishihara, S. Fujioka, and H. Nishimura, PHYSICS OF PLASMAS 12, 062706 (2005).
11. M. Shimomura et al, Appl. Phys. Express 1 056001(2008).
12. H. Tanaka, Y. Hashimoto, K. Tamaru, A.Takahashi and T. Okada, Appl. Phys. Lett. 89, 181109 (2006).
13. S. Fujioka, M. Shimomura, Y. Shimada, S. Maeda, H. Sakaguchi, Y. Nakai, T. Aota, H. Nishimura, N. Ozaki, A. Sunahara, K. Nishihara, N. Miyanaga, Y. Izawa, and Kunioki Mima, Appl. Phys. Lett. 92, 241502 (2008).