Optimization of the size ratio of Sn sphere and laser focal spot for an extreme ultraviolet light source

Applied Physics Letters

Volumn 93, Issue 22, 2008, Pages

  Yuspeh, S ^a   Sequoia, K L ^a   Tao, Y ^a   Tillack, M S ^a   Burdt, R ^a   Najmabadi, F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONVERSION EFFICIENCY; EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PULSES; LASERS; LIGHT; LIGHT SOURCES; LIGHTING; PLASMA DENSITY; PLASMAS; TIN; ULTRAVIOLET DEVICES; ULTRAVIOLET RADIATION;

DENSITY PROFILES; EUV EMISSIONS; EXTREME ULTRA VIOLET LIGHT SOURCES; EXTREME ULTRAVIOLETS; FOCAL SPOT SIZES; FOCAL SPOTS; GEOMETRIC EFFECTS; LASER SPOT SIZES; PLANAR TARGETS; SIZE RATIOS; SPHERE DIAMETERS; VARIABLE DIAMETERS;

SPHERES;

EID: 57349092465     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3036956     Document Type: Article

References (13)

1. P. J. Silverman, J. Microlithogr., Microfabr., Microsyst. 4, 011006 (2005).
2. Y. Tao, S. S. Harilal, M. S. Tillack, K. L. Sequoia, B. O'Shay, and F. Najmabadi, Opt. Lett. 31, 2492 (2006).
3. T. Okuno, S. Fujioka, H. Nishimura, Y. Tao, K. Nagai, Q. Gu, N. Ueda, T. Ando, K. Nishihara, T. Norimatsu, N. Miyanaga, Y. Izawa, and K. Mima, Appl. Phys. Lett. 88, 161501 (2006).
4. M. S. Tillack, K. L. Sequoia, and Y. Tao, J. Phys.: Conf. Ser. 112, 042060 (2008).
5. A. Sunahara, A. Sasaki, and K. Nishihara, J. Phys.: Conf. Ser. 112, 042048 (2008).
6. Y. Tao, M. S. Tillack, S. S. Harilal, K. L. Sequoia, and F. Najmabadi, J. Appl. Phys. 101, 023305 (2007).
7. Y. Tao, H. Nishimura, T. Okuno, S. Fujioka, N. Ueda, M. Nakai, K. Nagai, T. Norimatsu, N. Miyanaga, K. Nishihara, and Y. Izawa, Appl. Phys. Lett. 87, 241502 (2005).
8. K. L. Sequoia, Y. Tao, S. Yuspeh, R. Burdt, and M. S. Tillack, Appl. Phys. Lett. 92, 221505 (2008).
9. N. Nishimura, S. Fujioka, T. Okuno, Y. Tao, N. Ueda, T. Ando, T. Aota, Y. Yasuda, S. Uchida, Y. Shimada, M. Yamaura, J. Hashimoto, Q. Gu, K. Nagai, Y. Norimatsu, H. Furukawa, Y. G. Kang, A. Sunahara, K. Gamada, M. Murakami, K. Nishihara, M. Miyanaga, Y. Izawa, and K. Mima, J. Phys. IV 133, 1189 (2006).
10. S. George, C. S. Koay, K. Takenoshita, R. Bernath, M. Al-Rabban, C. Keyser, V. Bakshi, H. Scott, and M. Richardson, Proc. SPIE 5751, 779 (2005).
11. L. B. Da Silva, T. W. Barbee, Jr., R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, and F. Weber, Phys. Rev. Lett. 74, 3991 (1995).
12. L. Láska, J. Krása, M. Pfeifer, K. Rohlena, S. Gammino, L. Torrisi, L. And, and G. Ciavola, Rev. Sci. Instrum. 73, 654 (2002).
13. S. Fujioka, H. Nishimura, K. Nishihara, A. Sasaki, A. Sunahara, T. Okuno, N. Ueda, T. Ando, Y. Tao, Y. Shimada, K. Hashimoto, M. Yamaura, K. Shigemori, M. Nakai, K. Nagai, T. Norimatsu, T. Nishikawa, N. Miyanaga, Y. Izawa, and K. Mima, Phys. Rev. Lett. 95, 235004 (2005).